JPS5084834U - - Google Patents
Info
- Publication number
- JPS5084834U JPS5084834U JP14139873U JP14139873U JPS5084834U JP S5084834 U JPS5084834 U JP S5084834U JP 14139873 U JP14139873 U JP 14139873U JP 14139873 U JP14139873 U JP 14139873U JP S5084834 U JPS5084834 U JP S5084834U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- General Induction Heating (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14139873U JPS5314428Y2 (ja) | 1973-12-06 | 1973-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14139873U JPS5314428Y2 (ja) | 1973-12-06 | 1973-12-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5084834U true JPS5084834U (ja) | 1975-07-19 |
| JPS5314428Y2 JPS5314428Y2 (ja) | 1978-04-17 |
Family
ID=28420761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14139873U Expired JPS5314428Y2 (ja) | 1973-12-06 | 1973-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5314428Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0196370A (ja) * | 1987-09-23 | 1989-04-14 | Internatl Business Mach Corp <Ibm> | 蒸着用の蒸発源 |
-
1973
- 1973-12-06 JP JP14139873U patent/JPS5314428Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0196370A (ja) * | 1987-09-23 | 1989-04-14 | Internatl Business Mach Corp <Ibm> | 蒸着用の蒸発源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5314428Y2 (ja) | 1978-04-17 |