JPS53143165A - Epitaxial growing method - Google Patents
Epitaxial growing methodInfo
- Publication number
- JPS53143165A JPS53143165A JP5838077A JP5838077A JPS53143165A JP S53143165 A JPS53143165 A JP S53143165A JP 5838077 A JP5838077 A JP 5838077A JP 5838077 A JP5838077 A JP 5838077A JP S53143165 A JPS53143165 A JP S53143165A
- Authority
- JP
- Japan
- Prior art keywords
- growing method
- epitaxial growing
- epitaxial
- growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5838077A JPS53143165A (en) | 1977-05-20 | 1977-05-20 | Epitaxial growing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5838077A JPS53143165A (en) | 1977-05-20 | 1977-05-20 | Epitaxial growing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53143165A true JPS53143165A (en) | 1978-12-13 |
Family
ID=13082714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5838077A Pending JPS53143165A (en) | 1977-05-20 | 1977-05-20 | Epitaxial growing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53143165A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57159036A (en) * | 1981-03-25 | 1982-10-01 | Fujitsu Ltd | Forming method for pattern of indicating position of buried layer |
-
1977
- 1977-05-20 JP JP5838077A patent/JPS53143165A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57159036A (en) * | 1981-03-25 | 1982-10-01 | Fujitsu Ltd | Forming method for pattern of indicating position of buried layer |
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