JPS53143165A - Epitaxial growing method - Google Patents

Epitaxial growing method

Info

Publication number
JPS53143165A
JPS53143165A JP5838077A JP5838077A JPS53143165A JP S53143165 A JPS53143165 A JP S53143165A JP 5838077 A JP5838077 A JP 5838077A JP 5838077 A JP5838077 A JP 5838077A JP S53143165 A JPS53143165 A JP S53143165A
Authority
JP
Japan
Prior art keywords
growing method
epitaxial growing
epitaxial
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5838077A
Other languages
Japanese (ja)
Inventor
Nobuo Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Radio Co Ltd
Original Assignee
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Radio Co Ltd filed Critical Japan Radio Co Ltd
Priority to JP5838077A priority Critical patent/JPS53143165A/en
Publication of JPS53143165A publication Critical patent/JPS53143165A/en
Pending legal-status Critical Current

Links

JP5838077A 1977-05-20 1977-05-20 Epitaxial growing method Pending JPS53143165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5838077A JPS53143165A (en) 1977-05-20 1977-05-20 Epitaxial growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5838077A JPS53143165A (en) 1977-05-20 1977-05-20 Epitaxial growing method

Publications (1)

Publication Number Publication Date
JPS53143165A true JPS53143165A (en) 1978-12-13

Family

ID=13082714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5838077A Pending JPS53143165A (en) 1977-05-20 1977-05-20 Epitaxial growing method

Country Status (1)

Country Link
JP (1) JPS53143165A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159036A (en) * 1981-03-25 1982-10-01 Fujitsu Ltd Forming method for pattern of indicating position of buried layer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57159036A (en) * 1981-03-25 1982-10-01 Fujitsu Ltd Forming method for pattern of indicating position of buried layer

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