JPS531402B2 - - Google Patents

Info

Publication number
JPS531402B2
JPS531402B2 JP8623372A JP8623372A JPS531402B2 JP S531402 B2 JPS531402 B2 JP S531402B2 JP 8623372 A JP8623372 A JP 8623372A JP 8623372 A JP8623372 A JP 8623372A JP S531402 B2 JPS531402 B2 JP S531402B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8623372A
Other languages
Japanese (ja)
Other versions
JPS4947976A (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8623372A priority Critical patent/JPS531402B2/ja
Publication of JPS4947976A publication Critical patent/JPS4947976A/ja
Publication of JPS531402B2 publication Critical patent/JPS531402B2/ja
Expired legal-status Critical Current

Links

JP8623372A 1972-08-30 1972-08-30 Expired JPS531402B2 (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8623372A JPS531402B2 (nl) 1972-08-30 1972-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8623372A JPS531402B2 (nl) 1972-08-30 1972-08-30

Publications (2)

Publication Number Publication Date
JPS4947976A JPS4947976A (nl) 1974-05-09
JPS531402B2 true JPS531402B2 (nl) 1978-01-19

Family

ID=13881060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8623372A Expired JPS531402B2 (nl) 1972-08-30 1972-08-30

Country Status (1)

Country Link
JP (1) JPS531402B2 (nl)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5758332A (en) * 1980-09-24 1982-04-08 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS4947976A (nl) 1974-05-09

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