JPS5314019B2 - - Google Patents
Info
- Publication number
- JPS5314019B2 JPS5314019B2 JP12717472A JP12717472A JPS5314019B2 JP S5314019 B2 JPS5314019 B2 JP S5314019B2 JP 12717472 A JP12717472 A JP 12717472A JP 12717472 A JP12717472 A JP 12717472A JP S5314019 B2 JPS5314019 B2 JP S5314019B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Toys (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12717472A JPS5314019B2 (ja) | 1972-12-20 | 1972-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12717472A JPS5314019B2 (ja) | 1972-12-20 | 1972-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4984634A JPS4984634A (ja) | 1974-08-14 |
| JPS5314019B2 true JPS5314019B2 (ja) | 1978-05-15 |
Family
ID=14953483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12717472A Expired JPS5314019B2 (ja) | 1972-12-20 | 1972-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5314019B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63978Y2 (ja) * | 1981-05-21 | 1988-01-12 | ||
| WO2020166677A1 (ja) | 2019-02-13 | 2020-08-20 | 株式会社トクヤマ | オニウム塩を含む半導体ウェハの処理液 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS507978A (ja) * | 1973-05-29 | 1975-01-27 |
-
1972
- 1972-12-20 JP JP12717472A patent/JPS5314019B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS507978A (ja) * | 1973-05-29 | 1975-01-27 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63978Y2 (ja) * | 1981-05-21 | 1988-01-12 | ||
| WO2020166677A1 (ja) | 2019-02-13 | 2020-08-20 | 株式会社トクヤマ | オニウム塩を含む半導体ウェハの処理液 |
| KR20210127920A (ko) | 2019-02-13 | 2021-10-25 | 가부시끼가이샤 도꾸야마 | 오늄염을 포함하는 반도체 웨이퍼의 처리액 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4984634A (ja) | 1974-08-14 |