JPS53138790A - Method and device for full electronic monitor - Google Patents

Method and device for full electronic monitor

Info

Publication number
JPS53138790A
JPS53138790A JP5349577A JP5349577A JPS53138790A JP S53138790 A JPS53138790 A JP S53138790A JP 5349577 A JP5349577 A JP 5349577A JP 5349577 A JP5349577 A JP 5349577A JP S53138790 A JPS53138790 A JP S53138790A
Authority
JP
Japan
Prior art keywords
electronic monitor
full electronic
signal
unevenness
eliminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5349577A
Other languages
Japanese (ja)
Inventor
Takashi Kobayashi
Kenichi Suzuki
Hiroyasu Komata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP5349577A priority Critical patent/JPS53138790A/en
Publication of JPS53138790A publication Critical patent/JPS53138790A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Abstract

PURPOSE:To secure a real element concentration distribution plus its image by giving a division to the Auger signal of a specified element given from the uneven area of the test sample with the signal caught by the secondary electron catching electrode which is provided newly and thus eliminating the effect of the unevenness on the sample surface.
JP5349577A 1977-05-10 1977-05-10 Method and device for full electronic monitor Pending JPS53138790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5349577A JPS53138790A (en) 1977-05-10 1977-05-10 Method and device for full electronic monitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5349577A JPS53138790A (en) 1977-05-10 1977-05-10 Method and device for full electronic monitor

Publications (1)

Publication Number Publication Date
JPS53138790A true JPS53138790A (en) 1978-12-04

Family

ID=12944404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5349577A Pending JPS53138790A (en) 1977-05-10 1977-05-10 Method and device for full electronic monitor

Country Status (1)

Country Link
JP (1) JPS53138790A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4740693A (en) * 1984-12-14 1988-04-26 Hitachi, Ltd. Electron beam pattern line width measurement system
JP2012160261A (en) * 2011-01-28 2012-08-23 National Institute Of Advanced Industrial & Technology Axis alignment method and device of energy analyzer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4740693A (en) * 1984-12-14 1988-04-26 Hitachi, Ltd. Electron beam pattern line width measurement system
JP2012160261A (en) * 2011-01-28 2012-08-23 National Institute Of Advanced Industrial & Technology Axis alignment method and device of energy analyzer

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