JPS53138648U - - Google Patents
Info
- Publication number
- JPS53138648U JPS53138648U JP4366977U JP4366977U JPS53138648U JP S53138648 U JPS53138648 U JP S53138648U JP 4366977 U JP4366977 U JP 4366977U JP 4366977 U JP4366977 U JP 4366977U JP S53138648 U JPS53138648 U JP S53138648U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4366977U JPS53138648U (ja) | 1977-04-07 | 1977-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4366977U JPS53138648U (ja) | 1977-04-07 | 1977-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53138648U true JPS53138648U (ja) | 1978-11-02 |
Family
ID=28918526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4366977U Pending JPS53138648U (ja) | 1977-04-07 | 1977-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53138648U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS511381A (ja) * | 1974-05-10 | 1976-01-08 | Airco Inc | |
| JPS5337588A (en) * | 1976-09-21 | 1978-04-06 | Toshiba Corp | Sputtering electrode |
-
1977
- 1977-04-07 JP JP4366977U patent/JPS53138648U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS511381A (ja) * | 1974-05-10 | 1976-01-08 | Airco Inc | |
| JPS5337588A (en) * | 1976-09-21 | 1978-04-06 | Toshiba Corp | Sputtering electrode |