JPS53134369A - Electrostatic deflector for charged particles - Google Patents

Electrostatic deflector for charged particles

Info

Publication number
JPS53134369A
JPS53134369A JP4941477A JP4941477A JPS53134369A JP S53134369 A JPS53134369 A JP S53134369A JP 4941477 A JP4941477 A JP 4941477A JP 4941477 A JP4941477 A JP 4941477A JP S53134369 A JPS53134369 A JP S53134369A
Authority
JP
Japan
Prior art keywords
charged particles
electrostatic deflector
deflector
electrostatic
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4941477A
Other languages
Japanese (ja)
Other versions
JPS5413753B2 (en
Inventor
Hidekazu Gotou
Takashi Souma
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP4941477A priority Critical patent/JPS53134369A/en
Publication of JPS53134369A publication Critical patent/JPS53134369A/en
Publication of JPS5413753B2 publication Critical patent/JPS5413753B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4941477A 1977-04-28 1977-04-28 Electrostatic deflector for charged particles Granted JPS53134369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4941477A JPS53134369A (en) 1977-04-28 1977-04-28 Electrostatic deflector for charged particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4941477A JPS53134369A (en) 1977-04-28 1977-04-28 Electrostatic deflector for charged particles

Publications (2)

Publication Number Publication Date
JPS53134369A true JPS53134369A (en) 1978-11-22
JPS5413753B2 JPS5413753B2 (en) 1979-06-01

Family

ID=12830394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4941477A Granted JPS53134369A (en) 1977-04-28 1977-04-28 Electrostatic deflector for charged particles

Country Status (1)

Country Link
JP (1) JPS53134369A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059456U (en) * 1983-09-30 1985-04-25 セイコーインスツルメンツ株式会社 electrostatic deflector
JPS61131331A (en) * 1984-11-28 1986-06-19 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Electron beam apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059456U (en) * 1983-09-30 1985-04-25 セイコーインスツルメンツ株式会社 electrostatic deflector
JPH033955Y2 (en) * 1983-09-30 1991-01-31
JPS61131331A (en) * 1984-11-28 1986-06-19 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Electron beam apparatus

Also Published As

Publication number Publication date
JPS5413753B2 (en) 1979-06-01

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