JPS53132896A - Method of laser drawing and apparatus of the same - Google Patents

Method of laser drawing and apparatus of the same

Info

Publication number
JPS53132896A
JPS53132896A JP4682677A JP4682677A JPS53132896A JP S53132896 A JPS53132896 A JP S53132896A JP 4682677 A JP4682677 A JP 4682677A JP 4682677 A JP4682677 A JP 4682677A JP S53132896 A JPS53132896 A JP S53132896A
Authority
JP
Japan
Prior art keywords
same
laser
laser drawing
laser light
condensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4682677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5626556B2 (cg-RX-API-DMAC7.html
Inventor
Takeoki Miyauchi
Mikio Hongo
Ukyo Mikoshiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4682677A priority Critical patent/JPS53132896A/ja
Publication of JPS53132896A publication Critical patent/JPS53132896A/ja
Publication of JPS5626556B2 publication Critical patent/JPS5626556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP4682677A 1977-04-25 1977-04-25 Method of laser drawing and apparatus of the same Granted JPS53132896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4682677A JPS53132896A (en) 1977-04-25 1977-04-25 Method of laser drawing and apparatus of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4682677A JPS53132896A (en) 1977-04-25 1977-04-25 Method of laser drawing and apparatus of the same

Publications (2)

Publication Number Publication Date
JPS53132896A true JPS53132896A (en) 1978-11-20
JPS5626556B2 JPS5626556B2 (cg-RX-API-DMAC7.html) 1981-06-19

Family

ID=12758122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4682677A Granted JPS53132896A (en) 1977-04-25 1977-04-25 Method of laser drawing and apparatus of the same

Country Status (1)

Country Link
JP (1) JPS53132896A (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498400A (cg-RX-API-DMAC7.html) * 1972-05-13 1974-01-24
JPS4930792A (cg-RX-API-DMAC7.html) * 1972-02-29 1974-03-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930792A (cg-RX-API-DMAC7.html) * 1972-02-29 1974-03-19
JPS498400A (cg-RX-API-DMAC7.html) * 1972-05-13 1974-01-24

Also Published As

Publication number Publication date
JPS5626556B2 (cg-RX-API-DMAC7.html) 1981-06-19

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