JPS5313182Y2 - - Google Patents
Info
- Publication number
- JPS5313182Y2 JPS5313182Y2 JP6005473U JP6005473U JPS5313182Y2 JP S5313182 Y2 JPS5313182 Y2 JP S5313182Y2 JP 6005473 U JP6005473 U JP 6005473U JP 6005473 U JP6005473 U JP 6005473U JP S5313182 Y2 JPS5313182 Y2 JP S5313182Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6005473U JPS5313182Y2 (en) | 1973-05-22 | 1973-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6005473U JPS5313182Y2 (en) | 1973-05-22 | 1973-05-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS508681U JPS508681U (en) | 1975-01-29 |
| JPS5313182Y2 true JPS5313182Y2 (en) | 1978-04-10 |
Family
ID=28219333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6005473U Expired JPS5313182Y2 (en) | 1973-05-22 | 1973-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5313182Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01107368U (en) * | 1988-01-12 | 1989-07-19 | ||
| US7077264B2 (en) * | 2003-01-27 | 2006-07-18 | Applied Material, Inc. | Methods and apparatus for transporting substrate carriers |
-
1973
- 1973-05-22 JP JP6005473U patent/JPS5313182Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS508681U (en) | 1975-01-29 |