JPS53129399A - Surface lapping machine - Google Patents

Surface lapping machine

Info

Publication number
JPS53129399A
JPS53129399A JP4406877A JP4406877A JPS53129399A JP S53129399 A JPS53129399 A JP S53129399A JP 4406877 A JP4406877 A JP 4406877A JP 4406877 A JP4406877 A JP 4406877A JP S53129399 A JPS53129399 A JP S53129399A
Authority
JP
Japan
Prior art keywords
lapping machine
surface lapping
lap
work
sepately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4406877A
Other languages
Japanese (ja)
Inventor
Tokunobu Une
Yoshiyuki Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4406877A priority Critical patent/JPS53129399A/en
Publication of JPS53129399A publication Critical patent/JPS53129399A/en
Pending legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE:To correct the lapping surface of a lap as the surface of a work is processed without being hurt, by sepately driving the lap, work, and a correction wheel.
JP4406877A 1977-04-19 1977-04-19 Surface lapping machine Pending JPS53129399A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4406877A JPS53129399A (en) 1977-04-19 1977-04-19 Surface lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4406877A JPS53129399A (en) 1977-04-19 1977-04-19 Surface lapping machine

Publications (1)

Publication Number Publication Date
JPS53129399A true JPS53129399A (en) 1978-11-11

Family

ID=12681302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4406877A Pending JPS53129399A (en) 1977-04-19 1977-04-19 Surface lapping machine

Country Status (1)

Country Link
JP (1) JPS53129399A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643730A (en) * 1979-09-19 1981-04-22 Toshiba Corp Manufacture of tungsten or molybdenum semiconductor element substrate
JPS5741165A (en) * 1980-08-25 1982-03-08 Daiwa Giken:Kk Block holder in single-sided lapping machine
JPH0569313A (en) * 1991-09-03 1993-03-23 Takahiro Imahashi Method and device for forming high precision flat surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643730A (en) * 1979-09-19 1981-04-22 Toshiba Corp Manufacture of tungsten or molybdenum semiconductor element substrate
JPS5741165A (en) * 1980-08-25 1982-03-08 Daiwa Giken:Kk Block holder in single-sided lapping machine
JPH0569313A (en) * 1991-09-03 1993-03-23 Takahiro Imahashi Method and device for forming high precision flat surface

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