JPS5312783B2 - - Google Patents
Info
- Publication number
- JPS5312783B2 JPS5312783B2 JP2293475A JP2293475A JPS5312783B2 JP S5312783 B2 JPS5312783 B2 JP S5312783B2 JP 2293475 A JP2293475 A JP 2293475A JP 2293475 A JP2293475 A JP 2293475A JP S5312783 B2 JPS5312783 B2 JP S5312783B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50022934A JPS5198953A (en) | 1975-02-26 | 1975-02-26 | mos daioodono raifutaimu sokuteiho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50022934A JPS5198953A (en) | 1975-02-26 | 1975-02-26 | mos daioodono raifutaimu sokuteiho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5198953A JPS5198953A (en) | 1976-08-31 |
| JPS5312783B2 true JPS5312783B2 (OSRAM) | 1978-05-04 |
Family
ID=12096448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50022934A Granted JPS5198953A (en) | 1975-02-26 | 1975-02-26 | mos daioodono raifutaimu sokuteiho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5198953A (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53120370A (en) * | 1977-03-30 | 1978-10-20 | Agency Of Ind Science & Technol | Measuring method of diffusion distance of minority carriers and its apparatus |
| JP3098680B2 (ja) * | 1994-09-09 | 2000-10-16 | 三菱マテリアル株式会社 | 半導体ウェーハの内部欠陥の測定方法およびこれを用いた熱酸化炉の管理方法 |
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1975
- 1975-02-26 JP JP50022934A patent/JPS5198953A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5198953A (en) | 1976-08-31 |