JPS53126564U - - Google Patents
Info
- Publication number
- JPS53126564U JPS53126564U JP3239377U JP3239377U JPS53126564U JP S53126564 U JPS53126564 U JP S53126564U JP 3239377 U JP3239377 U JP 3239377U JP 3239377 U JP3239377 U JP 3239377U JP S53126564 U JPS53126564 U JP S53126564U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3239377U JPS5633151Y2 (https=) | 1977-03-17 | 1977-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3239377U JPS5633151Y2 (https=) | 1977-03-17 | 1977-03-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53126564U true JPS53126564U (https=) | 1978-10-07 |
| JPS5633151Y2 JPS5633151Y2 (https=) | 1981-08-06 |
Family
ID=28885802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3239377U Expired JPS5633151Y2 (https=) | 1977-03-17 | 1977-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633151Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848935A (ja) * | 1981-09-18 | 1983-03-23 | Tokyo Ohka Kogyo Co Ltd | 自動プラズマ処理装置 |
| JPH06329215A (ja) * | 1993-05-17 | 1994-11-29 | Dainippon Screen Mfg Co Ltd | 基板収納装置 |
-
1977
- 1977-03-17 JP JP3239377U patent/JPS5633151Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848935A (ja) * | 1981-09-18 | 1983-03-23 | Tokyo Ohka Kogyo Co Ltd | 自動プラズマ処理装置 |
| JPH06329215A (ja) * | 1993-05-17 | 1994-11-29 | Dainippon Screen Mfg Co Ltd | 基板収納装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5633151Y2 (https=) | 1981-08-06 |