JPS53126564U - - Google Patents

Info

Publication number
JPS53126564U
JPS53126564U JP3239377U JP3239377U JPS53126564U JP S53126564 U JPS53126564 U JP S53126564U JP 3239377 U JP3239377 U JP 3239377U JP 3239377 U JP3239377 U JP 3239377U JP S53126564 U JPS53126564 U JP S53126564U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3239377U
Other languages
Japanese (ja)
Other versions
JPS5633151Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3239377U priority Critical patent/JPS5633151Y2/ja
Publication of JPS53126564U publication Critical patent/JPS53126564U/ja
Application granted granted Critical
Publication of JPS5633151Y2 publication Critical patent/JPS5633151Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP3239377U 1977-03-17 1977-03-17 Expired JPS5633151Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3239377U JPS5633151Y2 (cg-RX-API-DMAC10.html) 1977-03-17 1977-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3239377U JPS5633151Y2 (cg-RX-API-DMAC10.html) 1977-03-17 1977-03-17

Publications (2)

Publication Number Publication Date
JPS53126564U true JPS53126564U (cg-RX-API-DMAC10.html) 1978-10-07
JPS5633151Y2 JPS5633151Y2 (cg-RX-API-DMAC10.html) 1981-08-06

Family

ID=28885802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3239377U Expired JPS5633151Y2 (cg-RX-API-DMAC10.html) 1977-03-17 1977-03-17

Country Status (1)

Country Link
JP (1) JPS5633151Y2 (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848935A (ja) * 1981-09-18 1983-03-23 Tokyo Ohka Kogyo Co Ltd 自動プラズマ処理装置
JPH06329215A (ja) * 1993-05-17 1994-11-29 Dainippon Screen Mfg Co Ltd 基板収納装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848935A (ja) * 1981-09-18 1983-03-23 Tokyo Ohka Kogyo Co Ltd 自動プラズマ処理装置
JPH06329215A (ja) * 1993-05-17 1994-11-29 Dainippon Screen Mfg Co Ltd 基板収納装置

Also Published As

Publication number Publication date
JPS5633151Y2 (cg-RX-API-DMAC10.html) 1981-08-06

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