JPS53122483A - Monitor apparatus of ion microanalyzer, or the like - Google Patents
Monitor apparatus of ion microanalyzer, or the likeInfo
- Publication number
- JPS53122483A JPS53122483A JP3698877A JP3698877A JPS53122483A JP S53122483 A JPS53122483 A JP S53122483A JP 3698877 A JP3698877 A JP 3698877A JP 3698877 A JP3698877 A JP 3698877A JP S53122483 A JPS53122483 A JP S53122483A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- mass number
- monitor apparatus
- ion microanalyzer
- microanalyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3698877A JPS53122483A (en) | 1977-03-31 | 1977-03-31 | Monitor apparatus of ion microanalyzer, or the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3698877A JPS53122483A (en) | 1977-03-31 | 1977-03-31 | Monitor apparatus of ion microanalyzer, or the like |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53122483A true JPS53122483A (en) | 1978-10-25 |
| JPS6313145B2 JPS6313145B2 (enExample) | 1988-03-24 |
Family
ID=12485120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3698877A Granted JPS53122483A (en) | 1977-03-31 | 1977-03-31 | Monitor apparatus of ion microanalyzer, or the like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53122483A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS571960A (en) * | 1980-06-04 | 1982-01-07 | Hitachi Ltd | Ion microanalyzer |
-
1977
- 1977-03-31 JP JP3698877A patent/JPS53122483A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS571960A (en) * | 1980-06-04 | 1982-01-07 | Hitachi Ltd | Ion microanalyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6313145B2 (enExample) | 1988-03-24 |
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