JPS53122483A - Monitor apparatus of ion microanalyzer, or the like - Google Patents

Monitor apparatus of ion microanalyzer, or the like

Info

Publication number
JPS53122483A
JPS53122483A JP3698877A JP3698877A JPS53122483A JP S53122483 A JPS53122483 A JP S53122483A JP 3698877 A JP3698877 A JP 3698877A JP 3698877 A JP3698877 A JP 3698877A JP S53122483 A JPS53122483 A JP S53122483A
Authority
JP
Japan
Prior art keywords
signal
mass number
monitor apparatus
ion microanalyzer
microanalyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3698877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6313145B2 (enrdf_load_stackoverflow
Inventor
Toshiyuki Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP3698877A priority Critical patent/JPS53122483A/ja
Publication of JPS53122483A publication Critical patent/JPS53122483A/ja
Publication of JPS6313145B2 publication Critical patent/JPS6313145B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP3698877A 1977-03-31 1977-03-31 Monitor apparatus of ion microanalyzer, or the like Granted JPS53122483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3698877A JPS53122483A (en) 1977-03-31 1977-03-31 Monitor apparatus of ion microanalyzer, or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3698877A JPS53122483A (en) 1977-03-31 1977-03-31 Monitor apparatus of ion microanalyzer, or the like

Publications (2)

Publication Number Publication Date
JPS53122483A true JPS53122483A (en) 1978-10-25
JPS6313145B2 JPS6313145B2 (enrdf_load_stackoverflow) 1988-03-24

Family

ID=12485120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3698877A Granted JPS53122483A (en) 1977-03-31 1977-03-31 Monitor apparatus of ion microanalyzer, or the like

Country Status (1)

Country Link
JP (1) JPS53122483A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571960A (en) * 1980-06-04 1982-01-07 Hitachi Ltd Ion microanalyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS571960A (en) * 1980-06-04 1982-01-07 Hitachi Ltd Ion microanalyzer

Also Published As

Publication number Publication date
JPS6313145B2 (enrdf_load_stackoverflow) 1988-03-24

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