JPS53120832A - Admission purifier of purified space - Google Patents

Admission purifier of purified space

Info

Publication number
JPS53120832A
JPS53120832A JP3450577A JP3450577A JPS53120832A JP S53120832 A JPS53120832 A JP S53120832A JP 3450577 A JP3450577 A JP 3450577A JP 3450577 A JP3450577 A JP 3450577A JP S53120832 A JPS53120832 A JP S53120832A
Authority
JP
Japan
Prior art keywords
admission
purifier
purified space
purified
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3450577A
Other languages
Japanese (ja)
Inventor
Satoshi Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3450577A priority Critical patent/JPS53120832A/en
Publication of JPS53120832A publication Critical patent/JPS53120832A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To automatically keep admission quantities approximately constant during the terms of the endurance of high performance filters.
COPYRIGHT: (C)1978,JPO&Japio
JP3450577A 1977-03-30 1977-03-30 Admission purifier of purified space Pending JPS53120832A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3450577A JPS53120832A (en) 1977-03-30 1977-03-30 Admission purifier of purified space

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3450577A JPS53120832A (en) 1977-03-30 1977-03-30 Admission purifier of purified space

Publications (1)

Publication Number Publication Date
JPS53120832A true JPS53120832A (en) 1978-10-21

Family

ID=12416105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3450577A Pending JPS53120832A (en) 1977-03-30 1977-03-30 Admission purifier of purified space

Country Status (1)

Country Link
JP (1) JPS53120832A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148038A (en) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd Cleaning method for clean workroom
US5827118A (en) * 1996-08-28 1998-10-27 Seh America, Inc. Clean storage unit air flow system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148038A (en) * 1986-12-10 1988-06-20 Sanki Eng Co Ltd Cleaning method for clean workroom
US5827118A (en) * 1996-08-28 1998-10-27 Seh America, Inc. Clean storage unit air flow system

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