JPS5311832B2 - - Google Patents

Info

Publication number
JPS5311832B2
JPS5311832B2 JP4810076A JP4810076A JPS5311832B2 JP S5311832 B2 JPS5311832 B2 JP S5311832B2 JP 4810076 A JP4810076 A JP 4810076A JP 4810076 A JP4810076 A JP 4810076A JP S5311832 B2 JPS5311832 B2 JP S5311832B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4810076A
Other languages
Japanese (ja)
Other versions
JPS52130570A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4810076A priority Critical patent/JPS52130570A/en
Publication of JPS52130570A publication Critical patent/JPS52130570A/en
Publication of JPS5311832B2 publication Critical patent/JPS5311832B2/ja
Granted legal-status Critical Current

Links

JP4810076A 1976-04-27 1976-04-27 Electron beam exposing device Granted JPS52130570A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4810076A JPS52130570A (en) 1976-04-27 1976-04-27 Electron beam exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4810076A JPS52130570A (en) 1976-04-27 1976-04-27 Electron beam exposing device

Publications (2)

Publication Number Publication Date
JPS52130570A JPS52130570A (en) 1977-11-01
JPS5311832B2 true JPS5311832B2 (en) 1978-04-25

Family

ID=12793887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4810076A Granted JPS52130570A (en) 1976-04-27 1976-04-27 Electron beam exposing device

Country Status (1)

Country Link
JP (1) JPS52130570A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54101675A (en) * 1978-01-27 1979-08-10 Cho Lsi Gijutsu Kenkyu Kumiai Electron beam optical lens barrel
JPS55146931A (en) * 1979-05-04 1980-11-15 Hitachi Ltd Depicting method by electronic beam
EP0053225B1 (en) * 1980-11-28 1985-03-13 International Business Machines Corporation Electron beam system and method
JPH0732110B2 (en) * 1984-05-18 1995-04-10 株式会社日立製作所 Electron beam exposure system

Also Published As

Publication number Publication date
JPS52130570A (en) 1977-11-01

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