JPS5311832B2 - - Google Patents
Info
- Publication number
- JPS5311832B2 JPS5311832B2 JP4810076A JP4810076A JPS5311832B2 JP S5311832 B2 JPS5311832 B2 JP S5311832B2 JP 4810076 A JP4810076 A JP 4810076A JP 4810076 A JP4810076 A JP 4810076A JP S5311832 B2 JPS5311832 B2 JP S5311832B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4810076A JPS52130570A (en) | 1976-04-27 | 1976-04-27 | Electron beam exposing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4810076A JPS52130570A (en) | 1976-04-27 | 1976-04-27 | Electron beam exposing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52130570A JPS52130570A (en) | 1977-11-01 |
JPS5311832B2 true JPS5311832B2 (en) | 1978-04-25 |
Family
ID=12793887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4810076A Granted JPS52130570A (en) | 1976-04-27 | 1976-04-27 | Electron beam exposing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52130570A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54101675A (en) * | 1978-01-27 | 1979-08-10 | Cho Lsi Gijutsu Kenkyu Kumiai | Electron beam optical lens barrel |
JPS55146931A (en) * | 1979-05-04 | 1980-11-15 | Hitachi Ltd | Depicting method by electronic beam |
EP0053225B1 (en) * | 1980-11-28 | 1985-03-13 | International Business Machines Corporation | Electron beam system and method |
JPH0732110B2 (en) * | 1984-05-18 | 1995-04-10 | 株式会社日立製作所 | Electron beam exposure system |
-
1976
- 1976-04-27 JP JP4810076A patent/JPS52130570A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS52130570A (en) | 1977-11-01 |