JPS53117723A - Barrier insulator - Google Patents

Barrier insulator

Info

Publication number
JPS53117723A
JPS53117723A JP3213677A JP3213677A JPS53117723A JP S53117723 A JPS53117723 A JP S53117723A JP 3213677 A JP3213677 A JP 3213677A JP 3213677 A JP3213677 A JP 3213677A JP S53117723 A JPS53117723 A JP S53117723A
Authority
JP
Japan
Prior art keywords
insulator
barrier insulator
inter
electrodes
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3213677A
Other languages
Japanese (ja)
Inventor
Tetsuo Yoshida
Nobuo Masaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3213677A priority Critical patent/JPS53117723A/en
Publication of JPS53117723A publication Critical patent/JPS53117723A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the air insulating distance between main circuits by setting up an insulator almost at the central part between a pair of electrodes and making the height of the insulator based on inter-electrode level into specified dimensions.
COPYRIGHT: (C)1978,JPO&Japio
JP3213677A 1977-03-25 1977-03-25 Barrier insulator Pending JPS53117723A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3213677A JPS53117723A (en) 1977-03-25 1977-03-25 Barrier insulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3213677A JPS53117723A (en) 1977-03-25 1977-03-25 Barrier insulator

Publications (1)

Publication Number Publication Date
JPS53117723A true JPS53117723A (en) 1978-10-14

Family

ID=12350470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3213677A Pending JPS53117723A (en) 1977-03-25 1977-03-25 Barrier insulator

Country Status (1)

Country Link
JP (1) JPS53117723A (en)

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