JPS53116269U - - Google Patents

Info

Publication number
JPS53116269U
JPS53116269U JP2186977U JP2186977U JPS53116269U JP S53116269 U JPS53116269 U JP S53116269U JP 2186977 U JP2186977 U JP 2186977U JP 2186977 U JP2186977 U JP 2186977U JP S53116269 U JPS53116269 U JP S53116269U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2186977U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2186977U priority Critical patent/JPS53116269U/ja
Publication of JPS53116269U publication Critical patent/JPS53116269U/ja
Pending legal-status Critical Current

Links

JP2186977U 1977-02-23 1977-02-23 Pending JPS53116269U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2186977U JPS53116269U (ja) 1977-02-23 1977-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2186977U JPS53116269U (ja) 1977-02-23 1977-02-23

Publications (1)

Publication Number Publication Date
JPS53116269U true JPS53116269U (ja) 1978-09-16

Family

ID=28855561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2186977U Pending JPS53116269U (ja) 1977-02-23 1977-02-23

Country Status (1)

Country Link
JP (1) JPS53116269U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007142199A (ja) * 2005-11-18 2007-06-07 Tokyo Seimitsu Co Ltd エキスパンドリング、及び該エキスパンドリングを使用した基板の分割方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007142199A (ja) * 2005-11-18 2007-06-07 Tokyo Seimitsu Co Ltd エキスパンドリング、及び該エキスパンドリングを使用した基板の分割方法
JP4714950B2 (ja) * 2005-11-18 2011-07-06 株式会社東京精密 エキスパンドリング、及び該エキスパンドリングを使用した基板の分割方法

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