JPS53116191A - Measuring method of patial pressure of mixed gases - Google Patents

Measuring method of patial pressure of mixed gases

Info

Publication number
JPS53116191A
JPS53116191A JP3060777A JP3060777A JPS53116191A JP S53116191 A JPS53116191 A JP S53116191A JP 3060777 A JP3060777 A JP 3060777A JP 3060777 A JP3060777 A JP 3060777A JP S53116191 A JPS53116191 A JP S53116191A
Authority
JP
Japan
Prior art keywords
pressure
patial
measuring method
mixed gases
degrees
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3060777A
Other languages
Japanese (ja)
Inventor
Toyoki Kazama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP3060777A priority Critical patent/JPS53116191A/en
Publication of JPS53116191A publication Critical patent/JPS53116191A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To readily measure the partial pressure of gas components of known constituent components by using a graph which indicates the change in the degrees of vacuum owing to partial gas pressure of a heat conduction system when the degrees of vacuum by an ionization system are set at a constant degree.
COPYRIGHT: (C)1978,JPO&Japio
JP3060777A 1977-03-19 1977-03-19 Measuring method of patial pressure of mixed gases Pending JPS53116191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3060777A JPS53116191A (en) 1977-03-19 1977-03-19 Measuring method of patial pressure of mixed gases

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3060777A JPS53116191A (en) 1977-03-19 1977-03-19 Measuring method of patial pressure of mixed gases

Publications (1)

Publication Number Publication Date
JPS53116191A true JPS53116191A (en) 1978-10-11

Family

ID=12308551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3060777A Pending JPS53116191A (en) 1977-03-19 1977-03-19 Measuring method of patial pressure of mixed gases

Country Status (1)

Country Link
JP (1) JPS53116191A (en)

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