JPS53114678A - Diffusion cleaning jig for producing semiconductor - Google Patents

Diffusion cleaning jig for producing semiconductor

Info

Publication number
JPS53114678A
JPS53114678A JP2867477A JP2867477A JPS53114678A JP S53114678 A JPS53114678 A JP S53114678A JP 2867477 A JP2867477 A JP 2867477A JP 2867477 A JP2867477 A JP 2867477A JP S53114678 A JPS53114678 A JP S53114678A
Authority
JP
Japan
Prior art keywords
producing semiconductor
cleaning jig
diffusion cleaning
diffusion
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2867477A
Other languages
Japanese (ja)
Other versions
JPS6013298B2 (en
Inventor
Susumu Inoue
Shigekatsu Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP2867477A priority Critical patent/JPS6013298B2/en
Publication of JPS53114678A publication Critical patent/JPS53114678A/en
Publication of JPS6013298B2 publication Critical patent/JPS6013298B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
JP2867477A 1977-03-17 1977-03-17 Diffusion cleaning jig for semiconductor manufacturing Expired JPS6013298B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2867477A JPS6013298B2 (en) 1977-03-17 1977-03-17 Diffusion cleaning jig for semiconductor manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2867477A JPS6013298B2 (en) 1977-03-17 1977-03-17 Diffusion cleaning jig for semiconductor manufacturing

Publications (2)

Publication Number Publication Date
JPS53114678A true JPS53114678A (en) 1978-10-06
JPS6013298B2 JPS6013298B2 (en) 1985-04-06

Family

ID=12255035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2867477A Expired JPS6013298B2 (en) 1977-03-17 1977-03-17 Diffusion cleaning jig for semiconductor manufacturing

Country Status (1)

Country Link
JP (1) JPS6013298B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884427A (en) * 1981-11-13 1983-05-20 Toshiba Corp Furnace tube for forming semiconductor-diffused layer
JPS59200432A (en) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd Tool for carrying wafer boat
JPS59200431A (en) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd Tool for carrying wafer boat
JPS6139545A (en) * 1984-07-31 1986-02-25 Toshiba Ceramics Co Ltd Wafer carrier
JPH0686333U (en) * 1987-03-30 1994-12-13 ノートン カンパニー Diffusion furnace components

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220352613A1 (en) 2020-07-22 2022-11-03 Nippon Telegraph And Telephone Corporation High-Frequency Package

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884427A (en) * 1981-11-13 1983-05-20 Toshiba Corp Furnace tube for forming semiconductor-diffused layer
JPS59200432A (en) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd Tool for carrying wafer boat
JPS59200431A (en) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd Tool for carrying wafer boat
JPS6139545A (en) * 1984-07-31 1986-02-25 Toshiba Ceramics Co Ltd Wafer carrier
JPH0686333U (en) * 1987-03-30 1994-12-13 ノートン カンパニー Diffusion furnace components

Also Published As

Publication number Publication date
JPS6013298B2 (en) 1985-04-06

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