JPS53114678A - Diffusion cleaning jig for producing semiconductor - Google Patents
Diffusion cleaning jig for producing semiconductorInfo
- Publication number
- JPS53114678A JPS53114678A JP2867477A JP2867477A JPS53114678A JP S53114678 A JPS53114678 A JP S53114678A JP 2867477 A JP2867477 A JP 2867477A JP 2867477 A JP2867477 A JP 2867477A JP S53114678 A JPS53114678 A JP S53114678A
- Authority
- JP
- Japan
- Prior art keywords
- producing semiconductor
- cleaning jig
- diffusion cleaning
- diffusion
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2867477A JPS6013298B2 (en) | 1977-03-17 | 1977-03-17 | Diffusion cleaning jig for semiconductor manufacturing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2867477A JPS6013298B2 (en) | 1977-03-17 | 1977-03-17 | Diffusion cleaning jig for semiconductor manufacturing |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53114678A true JPS53114678A (en) | 1978-10-06 |
JPS6013298B2 JPS6013298B2 (en) | 1985-04-06 |
Family
ID=12255035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2867477A Expired JPS6013298B2 (en) | 1977-03-17 | 1977-03-17 | Diffusion cleaning jig for semiconductor manufacturing |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6013298B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5884427A (en) * | 1981-11-13 | 1983-05-20 | Toshiba Corp | Furnace tube for forming semiconductor-diffused layer |
JPS59200432A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
JPS59200431A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
JPS6139545A (en) * | 1984-07-31 | 1986-02-25 | Toshiba Ceramics Co Ltd | Wafer carrier |
JPH0686333U (en) * | 1987-03-30 | 1994-12-13 | ノートン カンパニー | Diffusion furnace components |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220352613A1 (en) | 2020-07-22 | 2022-11-03 | Nippon Telegraph And Telephone Corporation | High-Frequency Package |
-
1977
- 1977-03-17 JP JP2867477A patent/JPS6013298B2/en not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5884427A (en) * | 1981-11-13 | 1983-05-20 | Toshiba Corp | Furnace tube for forming semiconductor-diffused layer |
JPS59200432A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
JPS59200431A (en) * | 1983-04-28 | 1984-11-13 | Toshiba Ceramics Co Ltd | Tool for carrying wafer boat |
JPS6139545A (en) * | 1984-07-31 | 1986-02-25 | Toshiba Ceramics Co Ltd | Wafer carrier |
JPH0686333U (en) * | 1987-03-30 | 1994-12-13 | ノートン カンパニー | Diffusion furnace components |
Also Published As
Publication number | Publication date |
---|---|
JPS6013298B2 (en) | 1985-04-06 |
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