JPS5311427B2 - - Google Patents
Info
- Publication number
- JPS5311427B2 JPS5311427B2 JP10301973A JP10301973A JPS5311427B2 JP S5311427 B2 JPS5311427 B2 JP S5311427B2 JP 10301973 A JP10301973 A JP 10301973A JP 10301973 A JP10301973 A JP 10301973A JP S5311427 B2 JPS5311427 B2 JP S5311427B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10301973A JPS5311427B2 (pm) | 1973-09-14 | 1973-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10301973A JPS5311427B2 (pm) | 1973-09-14 | 1973-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5056148A JPS5056148A (pm) | 1975-05-16 |
| JPS5311427B2 true JPS5311427B2 (pm) | 1978-04-21 |
Family
ID=14342923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10301973A Expired JPS5311427B2 (pm) | 1973-09-14 | 1973-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311427B2 (pm) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5213770A (en) * | 1975-07-22 | 1977-02-02 | Furuarouuea Inc | Waferrbascket |
| JPS5226173A (en) * | 1975-08-22 | 1977-02-26 | Hitachi Ltd | Manufacturing method of disc wafer casing jig |
| JPS5285476A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Semiconductor wafer accommodating jig |
| JPS54140656U (pm) * | 1978-03-22 | 1979-09-29 | ||
| JPS5577141A (en) * | 1978-12-07 | 1980-06-10 | Nec Corp | Etching method |
| JPH0225233Y2 (pm) * | 1980-09-30 | 1990-07-11 |
-
1973
- 1973-09-14 JP JP10301973A patent/JPS5311427B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5056148A (pm) | 1975-05-16 |