JPS5311424B2 - - Google Patents
Info
- Publication number
- JPS5311424B2 JPS5311424B2 JP2057974A JP2057974A JPS5311424B2 JP S5311424 B2 JPS5311424 B2 JP S5311424B2 JP 2057974 A JP2057974 A JP 2057974A JP 2057974 A JP2057974 A JP 2057974A JP S5311424 B2 JPS5311424 B2 JP S5311424B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2057974A JPS5311424B2 (fr) | 1974-02-22 | 1974-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2057974A JPS5311424B2 (fr) | 1974-02-22 | 1974-02-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50115971A JPS50115971A (fr) | 1975-09-10 |
| JPS5311424B2 true JPS5311424B2 (fr) | 1978-04-21 |
Family
ID=12031107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2057974A Expired JPS5311424B2 (fr) | 1974-02-22 | 1974-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5311424B2 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2730578B2 (ja) * | 1988-06-16 | 1998-03-25 | 洋太郎 畑村 | マイクロマニピユレータ |
| JP3335790B2 (ja) * | 1995-03-24 | 2002-10-21 | 日本電子株式会社 | 微細加工方法および装置 |
| JP2001088100A (ja) | 1999-09-24 | 2001-04-03 | Japan Science & Technology Corp | マイクロマニピュレーション方法 |
| JP5042282B2 (ja) * | 2009-07-27 | 2012-10-03 | 株式会社日立製作所 | イオンビーム装置 |
-
1974
- 1974-02-22 JP JP2057974A patent/JPS5311424B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50115971A (fr) | 1975-09-10 |