JPS5311189B2 - - Google Patents

Info

Publication number
JPS5311189B2
JPS5311189B2 JP10795072A JP10795072A JPS5311189B2 JP S5311189 B2 JPS5311189 B2 JP S5311189B2 JP 10795072 A JP10795072 A JP 10795072A JP 10795072 A JP10795072 A JP 10795072A JP S5311189 B2 JPS5311189 B2 JP S5311189B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10795072A
Other languages
Japanese (ja)
Other versions
JPS4966067A (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10795072A priority Critical patent/JPS5311189B2/ja
Publication of JPS4966067A publication Critical patent/JPS4966067A/ja
Publication of JPS5311189B2 publication Critical patent/JPS5311189B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10795072A 1972-10-30 1972-10-30 Expired JPS5311189B2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10795072A JPS5311189B2 (US20090163788A1-20090625-C00002.png) 1972-10-30 1972-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10795072A JPS5311189B2 (US20090163788A1-20090625-C00002.png) 1972-10-30 1972-10-30

Publications (2)

Publication Number Publication Date
JPS4966067A JPS4966067A (US20090163788A1-20090625-C00002.png) 1974-06-26
JPS5311189B2 true JPS5311189B2 (US20090163788A1-20090625-C00002.png) 1978-04-19

Family

ID=14472147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10795072A Expired JPS5311189B2 (US20090163788A1-20090625-C00002.png) 1972-10-30 1972-10-30

Country Status (1)

Country Link
JP (1) JPS5311189B2 (US20090163788A1-20090625-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54165490U (US20090163788A1-20090625-C00002.png) * 1978-05-11 1979-11-20
JPS6145050Y2 (US20090163788A1-20090625-C00002.png) * 1981-03-13 1986-12-18

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2743856A1 (de) * 1977-09-29 1979-04-12 Siemens Ag Verfahren und vorrichtung zum abscheiden von halbleitermaterial
JPS5944621U (ja) * 1982-09-10 1984-03-24 清 秀世 プレス機械におけるワ−ク保持用シリンダ装置
JPH0815180B2 (ja) * 1987-05-20 1996-02-14 富士通株式会社 気相成長膜表面の評価方法
JPS6441212A (en) * 1987-08-07 1989-02-13 Nec Corp Semiconductor crystal growth method
JPS6459808A (en) * 1987-08-31 1989-03-07 Nec Corp Growth of semiconductor
JP2007155176A (ja) * 2005-12-02 2007-06-21 Showa Tansan Co Ltd 非共沸混合物冷媒を使用するヒートポンプシステムまたは空調機若しくは冷凍機システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54165490U (US20090163788A1-20090625-C00002.png) * 1978-05-11 1979-11-20
JPS6145050Y2 (US20090163788A1-20090625-C00002.png) * 1981-03-13 1986-12-18

Also Published As

Publication number Publication date
JPS4966067A (US20090163788A1-20090625-C00002.png) 1974-06-26

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