JPS53106390A - Film-forming apparatus by ionic beam - Google Patents

Film-forming apparatus by ionic beam

Info

Publication number
JPS53106390A
JPS53106390A JP2124377A JP2124377A JPS53106390A JP S53106390 A JPS53106390 A JP S53106390A JP 2124377 A JP2124377 A JP 2124377A JP 2124377 A JP2124377 A JP 2124377A JP S53106390 A JPS53106390 A JP S53106390A
Authority
JP
Japan
Prior art keywords
film
forming apparatus
ionic beam
ionic
cone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2124377A
Other languages
Japanese (ja)
Inventor
Takao Furuse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2124377A priority Critical patent/JPS53106390A/en
Publication of JPS53106390A publication Critical patent/JPS53106390A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To increase film-forming rate and to make it possible to form a film of few defects caused through ionic impact by use of a cone-shaped electrode as one of discharge electrodes.
JP2124377A 1977-02-28 1977-02-28 Film-forming apparatus by ionic beam Pending JPS53106390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2124377A JPS53106390A (en) 1977-02-28 1977-02-28 Film-forming apparatus by ionic beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2124377A JPS53106390A (en) 1977-02-28 1977-02-28 Film-forming apparatus by ionic beam

Publications (1)

Publication Number Publication Date
JPS53106390A true JPS53106390A (en) 1978-09-16

Family

ID=12049602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2124377A Pending JPS53106390A (en) 1977-02-28 1977-02-28 Film-forming apparatus by ionic beam

Country Status (1)

Country Link
JP (1) JPS53106390A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024369A (en) * 1983-07-20 1985-02-07 Konishiroku Photo Ind Co Ltd Method and device for generating ion beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024369A (en) * 1983-07-20 1985-02-07 Konishiroku Photo Ind Co Ltd Method and device for generating ion beam
JPH033743B2 (en) * 1983-07-20 1991-01-21 Konishiroku Photo Ind

Similar Documents

Publication Publication Date Title
JPS5389360A (en) Electronic gun constituent
JPS53106390A (en) Film-forming apparatus by ionic beam
JPS5382290A (en) Display device with alarm display
JPS51137193A (en) Wire-cutting device making use of electric discharge
JPS51134093A (en) Electrode dividing method of piezo- electric vibrator
JPS5318896A (en) Electrospark machining method
JPS53146531A (en) Pickup tube
JPS527785A (en) Counter tube for measuring low-speed electrons
JPS51137999A (en) Intermittent discharge unit
JPS53105996A (en) Gas laser device
JPS5438756A (en) Method and apparatus for spot knocking of cathode-ray tube
JPS53131058A (en) Display device
JPS5420976A (en) Thin film forming device
JPS5369979A (en) System for reducing time of consuming smoke
JPS5248036A (en) Discharge-starting device between a discharging gap
JPS5412595A (en) Driving method of electrochromic display device
JPS5237439A (en) Electrostatic record device
JPS51115398A (en) Method and apparatus for moving electric discharge machining electrode for cutting impeller
JPS5435746A (en) Corona discharging device
JPS51150796A (en) Control ling method of discharge processing
JPS52112746A (en) Arrester
JPS52145243A (en) Electrochromic display unit
JPS527074A (en) Way of protecting discharge electrodes and its device
JPS52135662A (en) Electron beam deflection unit
JPS51150352A (en) Indicator