JPS53105981A - Etching device - Google Patents

Etching device

Info

Publication number
JPS53105981A
JPS53105981A JP2022077A JP2022077A JPS53105981A JP S53105981 A JPS53105981 A JP S53105981A JP 2022077 A JP2022077 A JP 2022077A JP 2022077 A JP2022077 A JP 2022077A JP S53105981 A JPS53105981 A JP S53105981A
Authority
JP
Japan
Prior art keywords
etching
etching device
unloader
loader
integrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022077A
Other languages
Japanese (ja)
Inventor
Hiroshi Maejima
Susumu Nanko
Hiroshi Nashihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2022077A priority Critical patent/JPS53105981A/en
Publication of JPS53105981A publication Critical patent/JPS53105981A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To secure an accurate etching for the micro pattern through an integrate a work, by installing the loader, etching mechanism, auxiliary housing mechanism, unloader and external appearance check mechanism onto one unit of the base board.
COPYRIGHT: (C)1978,JPO&Japio
JP2022077A 1977-02-28 1977-02-28 Etching device Pending JPS53105981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022077A JPS53105981A (en) 1977-02-28 1977-02-28 Etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022077A JPS53105981A (en) 1977-02-28 1977-02-28 Etching device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1233687A Division JPS62271436A (en) 1987-01-23 1987-01-23 Etching system

Publications (1)

Publication Number Publication Date
JPS53105981A true JPS53105981A (en) 1978-09-14

Family

ID=12021073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022077A Pending JPS53105981A (en) 1977-02-28 1977-02-28 Etching device

Country Status (1)

Country Link
JP (1) JPS53105981A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103439A (en) * 1980-01-21 1981-08-18 Mitsubishi Electric Corp Apparatus for treating semiconductor substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4985969A (en) * 1972-12-20 1974-08-17
JPS5142916A (en) * 1974-10-09 1976-04-12 Sumitomo Metal Ind

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4985969A (en) * 1972-12-20 1974-08-17
JPS5142916A (en) * 1974-10-09 1976-04-12 Sumitomo Metal Ind

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103439A (en) * 1980-01-21 1981-08-18 Mitsubishi Electric Corp Apparatus for treating semiconductor substrate
JPH0122979B2 (en) * 1980-01-21 1989-04-28 Mitsubishi Electric Corp

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