JPS53102053A - Forming method of singlemode thin film optical wave guide - Google Patents

Forming method of singlemode thin film optical wave guide

Info

Publication number
JPS53102053A
JPS53102053A JP1684677A JP1684677A JPS53102053A JP S53102053 A JPS53102053 A JP S53102053A JP 1684677 A JP1684677 A JP 1684677A JP 1684677 A JP1684677 A JP 1684677A JP S53102053 A JPS53102053 A JP S53102053A
Authority
JP
Japan
Prior art keywords
thin film
film optical
singlemode
forming method
wave guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1684677A
Other languages
Japanese (ja)
Inventor
Hatsuhiko Naito
Masahiro Nunoshita
Kazuo Nishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1684677A priority Critical patent/JPS53102053A/en
Publication of JPS53102053A publication Critical patent/JPS53102053A/en
Pending legal-status Critical Current

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  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To make possible easy realization of a thin film optical waveguide of single mode without causing the decrease in electrooptic effect and the increase in transmission loss by thermally diffusing metal Ti on a LiNbO3 substrate under specific conditions.
JP1684677A 1977-02-17 1977-02-17 Forming method of singlemode thin film optical wave guide Pending JPS53102053A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1684677A JPS53102053A (en) 1977-02-17 1977-02-17 Forming method of singlemode thin film optical wave guide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1684677A JPS53102053A (en) 1977-02-17 1977-02-17 Forming method of singlemode thin film optical wave guide

Publications (1)

Publication Number Publication Date
JPS53102053A true JPS53102053A (en) 1978-09-06

Family

ID=11927567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1684677A Pending JPS53102053A (en) 1977-02-17 1977-02-17 Forming method of singlemode thin film optical wave guide

Country Status (1)

Country Link
JP (1) JPS53102053A (en)

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