JPS53100224A - Radiation sensitive positive regist material - Google Patents

Radiation sensitive positive regist material

Info

Publication number
JPS53100224A
JPS53100224A JP1458077A JP1458077A JPS53100224A JP S53100224 A JPS53100224 A JP S53100224A JP 1458077 A JP1458077 A JP 1458077A JP 1458077 A JP1458077 A JP 1458077A JP S53100224 A JPS53100224 A JP S53100224A
Authority
JP
Japan
Prior art keywords
regist
radiation sensitive
sensitive positive
positive
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1458077A
Other languages
Japanese (ja)
Inventor
Tsukasa Tada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP1458077A priority Critical patent/JPS53100224A/en
Publication of JPS53100224A publication Critical patent/JPS53100224A/en
Pending legal-status Critical Current

Links

JP1458077A 1977-02-15 1977-02-15 Radiation sensitive positive regist material Pending JPS53100224A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1458077A JPS53100224A (en) 1977-02-15 1977-02-15 Radiation sensitive positive regist material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1458077A JPS53100224A (en) 1977-02-15 1977-02-15 Radiation sensitive positive regist material

Publications (1)

Publication Number Publication Date
JPS53100224A true JPS53100224A (en) 1978-09-01

Family

ID=11865092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1458077A Pending JPS53100224A (en) 1977-02-15 1977-02-15 Radiation sensitive positive regist material

Country Status (1)

Country Link
JP (1) JPS53100224A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518638A (en) * 1978-07-27 1980-02-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Ionized radiation sensitive positive type resist
JPS5860536A (en) * 1981-10-06 1983-04-11 Toshiba Corp Method for forming resist image

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518638A (en) * 1978-07-27 1980-02-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Ionized radiation sensitive positive type resist
JPS57969B2 (en) * 1978-07-27 1982-01-08
JPS5860536A (en) * 1981-10-06 1983-04-11 Toshiba Corp Method for forming resist image
JPH0328703B2 (en) * 1981-10-06 1991-04-19 Tokyo Shibaura Electric Co

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