JPS529352B2 - - Google Patents
Info
- Publication number
- JPS529352B2 JPS529352B2 JP2491172A JP2491172A JPS529352B2 JP S529352 B2 JPS529352 B2 JP S529352B2 JP 2491172 A JP2491172 A JP 2491172A JP 2491172 A JP2491172 A JP 2491172A JP S529352 B2 JPS529352 B2 JP S529352B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2491172A JPS529352B2 (cs) | 1972-03-10 | 1972-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2491172A JPS529352B2 (cs) | 1972-03-10 | 1972-03-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4893270A JPS4893270A (cs) | 1973-12-03 |
| JPS529352B2 true JPS529352B2 (cs) | 1977-03-15 |
Family
ID=12151344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2491172A Expired JPS529352B2 (cs) | 1972-03-10 | 1972-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS529352B2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2725895B2 (ja) * | 1991-02-18 | 1998-03-11 | シャープ株式会社 | 露光機構 |
-
1972
- 1972-03-10 JP JP2491172A patent/JPS529352B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4893270A (cs) | 1973-12-03 |