JPS4893270A - - Google Patents

Info

Publication number
JPS4893270A
JPS4893270A JP2491172A JP2491172A JPS4893270A JP S4893270 A JPS4893270 A JP S4893270A JP 2491172 A JP2491172 A JP 2491172A JP 2491172 A JP2491172 A JP 2491172A JP S4893270 A JPS4893270 A JP S4893270A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2491172A
Other languages
Japanese (ja)
Other versions
JPS529352B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2491172A priority Critical patent/JPS529352B2/ja
Publication of JPS4893270A publication Critical patent/JPS4893270A/ja
Publication of JPS529352B2 publication Critical patent/JPS529352B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2491172A 1972-03-10 1972-03-10 Expired JPS529352B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2491172A JPS529352B2 (cs) 1972-03-10 1972-03-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2491172A JPS529352B2 (cs) 1972-03-10 1972-03-10

Publications (2)

Publication Number Publication Date
JPS4893270A true JPS4893270A (cs) 1973-12-03
JPS529352B2 JPS529352B2 (cs) 1977-03-15

Family

ID=12151344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2491172A Expired JPS529352B2 (cs) 1972-03-10 1972-03-10

Country Status (1)

Country Link
JP (1) JPS529352B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04263254A (ja) * 1991-02-18 1992-09-18 Sharp Corp 露光機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04263254A (ja) * 1991-02-18 1992-09-18 Sharp Corp 露光機構

Also Published As

Publication number Publication date
JPS529352B2 (cs) 1977-03-15

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