JPS5293332A - Polymer materials for electronic irradiation resist - Google Patents

Polymer materials for electronic irradiation resist

Info

Publication number
JPS5293332A
JPS5293332A JP1013076A JP1013076A JPS5293332A JP S5293332 A JPS5293332 A JP S5293332A JP 1013076 A JP1013076 A JP 1013076A JP 1013076 A JP1013076 A JP 1013076A JP S5293332 A JPS5293332 A JP S5293332A
Authority
JP
Japan
Prior art keywords
polymer materials
electronic irradiation
resist
irradiation resist
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1013076A
Other languages
Japanese (ja)
Inventor
Norinaga Fujishige
Susumu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1013076A priority Critical patent/JPS5293332A/en
Publication of JPS5293332A publication Critical patent/JPS5293332A/en
Pending legal-status Critical Current

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  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

PURPOSE: To use a specific (co) polymer of methacrylate so that the resist may show high sensitivity and sharp suceptibility of decomposition under electronic irradiation and a highsensitivity positive picture obtained after development process with an organic solvent.
COPYRIGHT: (C)1977,JPO&Japio
JP1013076A 1976-02-02 1976-02-02 Polymer materials for electronic irradiation resist Pending JPS5293332A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1013076A JPS5293332A (en) 1976-02-02 1976-02-02 Polymer materials for electronic irradiation resist

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1013076A JPS5293332A (en) 1976-02-02 1976-02-02 Polymer materials for electronic irradiation resist

Publications (1)

Publication Number Publication Date
JPS5293332A true JPS5293332A (en) 1977-08-05

Family

ID=11741694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1013076A Pending JPS5293332A (en) 1976-02-02 1976-02-02 Polymer materials for electronic irradiation resist

Country Status (1)

Country Link
JP (1) JPS5293332A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915372A (en) * 1972-03-24 1974-02-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915372A (en) * 1972-03-24 1974-02-09

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