JPS5293332A - Polymer materials for electronic irradiation resist - Google Patents
Polymer materials for electronic irradiation resistInfo
- Publication number
- JPS5293332A JPS5293332A JP1013076A JP1013076A JPS5293332A JP S5293332 A JPS5293332 A JP S5293332A JP 1013076 A JP1013076 A JP 1013076A JP 1013076 A JP1013076 A JP 1013076A JP S5293332 A JPS5293332 A JP S5293332A
- Authority
- JP
- Japan
- Prior art keywords
- polymer materials
- electronic irradiation
- resist
- irradiation resist
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
PURPOSE: To use a specific (co) polymer of methacrylate so that the resist may show high sensitivity and sharp suceptibility of decomposition under electronic irradiation and a highsensitivity positive picture obtained after development process with an organic solvent.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1013076A JPS5293332A (en) | 1976-02-02 | 1976-02-02 | Polymer materials for electronic irradiation resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1013076A JPS5293332A (en) | 1976-02-02 | 1976-02-02 | Polymer materials for electronic irradiation resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5293332A true JPS5293332A (en) | 1977-08-05 |
Family
ID=11741694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1013076A Pending JPS5293332A (en) | 1976-02-02 | 1976-02-02 | Polymer materials for electronic irradiation resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5293332A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915372A (en) * | 1972-03-24 | 1974-02-09 |
-
1976
- 1976-02-02 JP JP1013076A patent/JPS5293332A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4915372A (en) * | 1972-03-24 | 1974-02-09 |
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