JPS5292584A - Solid state analyzer for composition analysis of deisred area - Google Patents

Solid state analyzer for composition analysis of deisred area

Info

Publication number
JPS5292584A
JPS5292584A JP847376A JP847376A JPS5292584A JP S5292584 A JPS5292584 A JP S5292584A JP 847376 A JP847376 A JP 847376A JP 847376 A JP847376 A JP 847376A JP S5292584 A JPS5292584 A JP S5292584A
Authority
JP
Japan
Prior art keywords
area
deisred
solid state
composition analysis
state analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP847376A
Other languages
English (en)
Inventor
Hiroshi Doi
Kuniyuki Sakumichi
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP847376A priority Critical patent/JPS5292584A/ja
Publication of JPS5292584A publication Critical patent/JPS5292584A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP847376A 1976-01-30 1976-01-30 Solid state analyzer for composition analysis of deisred area Pending JPS5292584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP847376A JPS5292584A (en) 1976-01-30 1976-01-30 Solid state analyzer for composition analysis of deisred area

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP847376A JPS5292584A (en) 1976-01-30 1976-01-30 Solid state analyzer for composition analysis of deisred area

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP60082348A Division JPS60258838A (ja) 1985-04-19 1985-04-19 任意領域の固体表面分析装置

Publications (1)

Publication Number Publication Date
JPS5292584A true JPS5292584A (en) 1977-08-04

Family

ID=11694074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP847376A Pending JPS5292584A (en) 1976-01-30 1976-01-30 Solid state analyzer for composition analysis of deisred area

Country Status (1)

Country Link
JP (1) JPS5292584A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224549A (ja) * 1983-06-04 1984-12-17 Shimadzu Corp 質量分析装置
JPH03184251A (ja) * 1989-12-12 1991-08-12 Shimadzu Corp 試料表面分析装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224549A (ja) * 1983-06-04 1984-12-17 Shimadzu Corp 質量分析装置
JPH03184251A (ja) * 1989-12-12 1991-08-12 Shimadzu Corp 試料表面分析装置

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