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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP497976ApriorityCriticalpatent/JPS5289385A/en
Publication of JPS5289385ApublicationCriticalpatent/JPS5289385A/en
PURPOSE: To stably maintain and control the concentration of corrosive gas atmosphere by supplying carrier gases to a liquid layer, in which test gases are dissolved in advance, to supply the system with the mixture gases of the test gases and the carrier gases.
COPYRIGHT: (C)1977,JPO&Japio
JP497976A1976-01-211976-01-21Preparing method for low concentration gas atmosphere
PendingJPS5289385A
(en)