JPS5288774A - Vacuum valve - Google Patents

Vacuum valve

Info

Publication number
JPS5288774A
JPS5288774A JP463676A JP463676A JPS5288774A JP S5288774 A JPS5288774 A JP S5288774A JP 463676 A JP463676 A JP 463676A JP 463676 A JP463676 A JP 463676A JP S5288774 A JPS5288774 A JP S5288774A
Authority
JP
Japan
Prior art keywords
vacuum valve
vacuum
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP463676A
Other languages
Japanese (ja)
Inventor
Hideo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP463676A priority Critical patent/JPS5288774A/en
Publication of JPS5288774A publication Critical patent/JPS5288774A/en
Pending legal-status Critical Current

Links

JP463676A 1976-01-20 1976-01-20 Vacuum valve Pending JPS5288774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP463676A JPS5288774A (en) 1976-01-20 1976-01-20 Vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP463676A JPS5288774A (en) 1976-01-20 1976-01-20 Vacuum valve

Publications (1)

Publication Number Publication Date
JPS5288774A true JPS5288774A (en) 1977-07-25

Family

ID=11589479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP463676A Pending JPS5288774A (en) 1976-01-20 1976-01-20 Vacuum valve

Country Status (1)

Country Link
JP (1) JPS5288774A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6220439U (en) * 1985-07-23 1987-02-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6220439U (en) * 1985-07-23 1987-02-06

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