JPS5287034A - Image formation - Google Patents
Image formationInfo
- Publication number
- JPS5287034A JPS5287034A JP381276A JP381276A JPS5287034A JP S5287034 A JPS5287034 A JP S5287034A JP 381276 A JP381276 A JP 381276A JP 381276 A JP381276 A JP 381276A JP S5287034 A JPS5287034 A JP S5287034A
- Authority
- JP
- Japan
- Prior art keywords
- image formation
- image forming
- forming layer
- image
- etchbleaching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C5/00—Photographic processes or agents therefor; Regeneration of such processing agents
- G03C5/26—Processes using silver-salt-containing photosensitive materials or agents therefor
- G03C5/40—Chemically transforming developed images
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/80—Etching
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Silver Salt Photography Or Processing Solution Therefor (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP381276A JPS5287034A (en) | 1976-01-16 | 1976-01-16 | Image formation |
DE19772701458 DE2701458A1 (de) | 1976-01-16 | 1977-01-14 | Verfahren zur herstellung von bildern |
NL7700378A NL7700378A (nl) | 1976-01-16 | 1977-01-14 | Werkwijze voor het vormen van beelden. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP381276A JPS5287034A (en) | 1976-01-16 | 1976-01-16 | Image formation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5287034A true JPS5287034A (en) | 1977-07-20 |
JPS6113576B2 JPS6113576B2 (de) | 1986-04-14 |
Family
ID=11567594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP381276A Granted JPS5287034A (en) | 1976-01-16 | 1976-01-16 | Image formation |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5287034A (de) |
DE (1) | DE2701458A1 (de) |
NL (1) | NL7700378A (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5654440A (en) * | 1979-10-11 | 1981-05-14 | Dainippon Printing Co Ltd | Photosensitive lithographic material and plate making method |
JPS5731197A (en) * | 1980-07-31 | 1982-02-19 | Sharp Kk | Method of producing multilayer circuit board |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04124885U (ja) * | 1991-04-26 | 1992-11-13 | アスモ株式会社 | ステツピングモータ |
US6391790B1 (en) | 2000-05-22 | 2002-05-21 | Applied Materials, Inc. | Method and apparatus for etching photomasks |
EP1290495A2 (de) * | 2000-06-15 | 2003-03-12 | Applied Materials, Inc. | Methode und gerät zum ätzen von metallischen schichten auf oberflächen |
US7183201B2 (en) | 2001-07-23 | 2007-02-27 | Applied Materials, Inc. | Selective etching of organosilicate films over silicon oxide stop etch layers |
WO2003021659A1 (en) | 2001-09-04 | 2003-03-13 | Applied Materials, Inc. | Methods and apparatus for etching metal layers on substrates |
US6960413B2 (en) | 2003-03-21 | 2005-11-01 | Applied Materials, Inc. | Multi-step process for etching photomasks |
US7077973B2 (en) | 2003-04-18 | 2006-07-18 | Applied Materials, Inc. | Methods for substrate orientation |
US7521000B2 (en) | 2003-08-28 | 2009-04-21 | Applied Materials, Inc. | Process for etching photomasks |
US7829243B2 (en) | 2005-01-27 | 2010-11-09 | Applied Materials, Inc. | Method for plasma etching a chromium layer suitable for photomask fabrication |
-
1976
- 1976-01-16 JP JP381276A patent/JPS5287034A/ja active Granted
-
1977
- 1977-01-14 DE DE19772701458 patent/DE2701458A1/de active Pending
- 1977-01-14 NL NL7700378A patent/NL7700378A/xx not_active Application Discontinuation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5654440A (en) * | 1979-10-11 | 1981-05-14 | Dainippon Printing Co Ltd | Photosensitive lithographic material and plate making method |
JPS6158032B2 (de) * | 1979-10-11 | 1986-12-09 | Dainippon Printing Co Ltd | |
JPS5731197A (en) * | 1980-07-31 | 1982-02-19 | Sharp Kk | Method of producing multilayer circuit board |
Also Published As
Publication number | Publication date |
---|---|
JPS6113576B2 (de) | 1986-04-14 |
NL7700378A (nl) | 1977-07-19 |
DE2701458A1 (de) | 1977-07-21 |
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