JPS5282370A - Manufacture of groove-shaped photo micro sensor - Google Patents

Manufacture of groove-shaped photo micro sensor

Info

Publication number
JPS5282370A
JPS5282370A JP15642975A JP15642975A JPS5282370A JP S5282370 A JPS5282370 A JP S5282370A JP 15642975 A JP15642975 A JP 15642975A JP 15642975 A JP15642975 A JP 15642975A JP S5282370 A JPS5282370 A JP S5282370A
Authority
JP
Japan
Prior art keywords
groove
manufacture
micro sensor
shaped photo
photo micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15642975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5641955B2 (OSRAM
Inventor
Seisuke Hinota
Masanobu Koide
Masakatsu Kurita
Tsukasa Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP15642975A priority Critical patent/JPS5282370A/ja
Publication of JPS5282370A publication Critical patent/JPS5282370A/ja
Publication of JPS5641955B2 publication Critical patent/JPS5641955B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Geophysics And Detection Of Objects (AREA)
JP15642975A 1975-12-29 1975-12-29 Manufacture of groove-shaped photo micro sensor Granted JPS5282370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15642975A JPS5282370A (en) 1975-12-29 1975-12-29 Manufacture of groove-shaped photo micro sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15642975A JPS5282370A (en) 1975-12-29 1975-12-29 Manufacture of groove-shaped photo micro sensor

Publications (2)

Publication Number Publication Date
JPS5282370A true JPS5282370A (en) 1977-07-09
JPS5641955B2 JPS5641955B2 (OSRAM) 1981-10-01

Family

ID=15627543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15642975A Granted JPS5282370A (en) 1975-12-29 1975-12-29 Manufacture of groove-shaped photo micro sensor

Country Status (1)

Country Link
JP (1) JPS5282370A (OSRAM)

Also Published As

Publication number Publication date
JPS5641955B2 (OSRAM) 1981-10-01

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