JPS5280978U - - Google Patents

Info

Publication number
JPS5280978U
JPS5280978U JP16963775U JP16963775U JPS5280978U JP S5280978 U JPS5280978 U JP S5280978U JP 16963775 U JP16963775 U JP 16963775U JP 16963775 U JP16963775 U JP 16963775U JP S5280978 U JPS5280978 U JP S5280978U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16963775U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16963775U priority Critical patent/JPS5280978U/ja
Publication of JPS5280978U publication Critical patent/JPS5280978U/ja
Pending legal-status Critical Current

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  • Warehouses Or Storage Devices (AREA)
JP16963775U 1975-12-15 1975-12-15 Pending JPS5280978U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16963775U JPS5280978U (zh) 1975-12-15 1975-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16963775U JPS5280978U (zh) 1975-12-15 1975-12-15

Publications (1)

Publication Number Publication Date
JPS5280978U true JPS5280978U (zh) 1977-06-16

Family

ID=28648174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16963775U Pending JPS5280978U (zh) 1975-12-15 1975-12-15

Country Status (1)

Country Link
JP (1) JPS5280978U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082506A (ja) * 1983-10-07 1985-05-10 Fujitsu Ltd 半導体ウェハの搬送装置
EP4046943A1 (en) * 2021-02-22 2022-08-24 Toyota Jidosha Kabushiki Kaisha Transport system, transport method, and non-transitory storage medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082506A (ja) * 1983-10-07 1985-05-10 Fujitsu Ltd 半導体ウェハの搬送装置
EP4046943A1 (en) * 2021-02-22 2022-08-24 Toyota Jidosha Kabushiki Kaisha Transport system, transport method, and non-transitory storage medium
CN114955933A (zh) * 2021-02-22 2022-08-30 丰田自动车株式会社 搬运系统、搬运方法和非暂时性存储介质

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