JPS5279953A - Film thickness monitor for thin film production - Google Patents

Film thickness monitor for thin film production

Info

Publication number
JPS5279953A
JPS5279953A JP15484775A JP15484775A JPS5279953A JP S5279953 A JPS5279953 A JP S5279953A JP 15484775 A JP15484775 A JP 15484775A JP 15484775 A JP15484775 A JP 15484775A JP S5279953 A JPS5279953 A JP S5279953A
Authority
JP
Japan
Prior art keywords
thickness monitor
thin film
film thickness
production
film production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15484775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS577642B2 (OSRAM
Inventor
Akihiko Toku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP15484775A priority Critical patent/JPS5279953A/ja
Publication of JPS5279953A publication Critical patent/JPS5279953A/ja
Publication of JPS577642B2 publication Critical patent/JPS577642B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP15484775A 1975-12-26 1975-12-26 Film thickness monitor for thin film production Granted JPS5279953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15484775A JPS5279953A (en) 1975-12-26 1975-12-26 Film thickness monitor for thin film production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15484775A JPS5279953A (en) 1975-12-26 1975-12-26 Film thickness monitor for thin film production

Publications (2)

Publication Number Publication Date
JPS5279953A true JPS5279953A (en) 1977-07-05
JPS577642B2 JPS577642B2 (OSRAM) 1982-02-12

Family

ID=15593187

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15484775A Granted JPS5279953A (en) 1975-12-26 1975-12-26 Film thickness monitor for thin film production

Country Status (1)

Country Link
JP (1) JPS5279953A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5872213A (ja) * 1981-10-27 1983-04-30 Fujitsu Ltd 研摩磁性塗膜の厚さ制御方法
JPS5973709A (ja) * 1982-10-20 1984-04-26 Ulvac Corp 光学膜形成装置における膜厚監視装置
JPH03237304A (ja) * 1990-02-14 1991-10-23 Anelva Corp 薄膜作製装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5872213A (ja) * 1981-10-27 1983-04-30 Fujitsu Ltd 研摩磁性塗膜の厚さ制御方法
JPS5973709A (ja) * 1982-10-20 1984-04-26 Ulvac Corp 光学膜形成装置における膜厚監視装置
JPH03237304A (ja) * 1990-02-14 1991-10-23 Anelva Corp 薄膜作製装置

Also Published As

Publication number Publication date
JPS577642B2 (OSRAM) 1982-02-12

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