JPS527683A - Gas phase glowing furnace with automatic cleaning apparatus - Google Patents

Gas phase glowing furnace with automatic cleaning apparatus

Info

Publication number
JPS527683A
JPS527683A JP8420375A JP8420375A JPS527683A JP S527683 A JPS527683 A JP S527683A JP 8420375 A JP8420375 A JP 8420375A JP 8420375 A JP8420375 A JP 8420375A JP S527683 A JPS527683 A JP S527683A
Authority
JP
Japan
Prior art keywords
gas phase
cleaning apparatus
automatic cleaning
glowing furnace
glowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8420375A
Other languages
Japanese (ja)
Inventor
Tatsuya Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP8420375A priority Critical patent/JPS527683A/en
Publication of JPS527683A publication Critical patent/JPS527683A/en
Pending legal-status Critical Current

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  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To eliminate the labour and danger of workers by automatically cleaning a glowing furnace for the glow of silicon oxide films or the likes through gas phase reaction.
COPYRIGHT: (C)1977,JPO&Japio
JP8420375A 1975-07-08 1975-07-08 Gas phase glowing furnace with automatic cleaning apparatus Pending JPS527683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8420375A JPS527683A (en) 1975-07-08 1975-07-08 Gas phase glowing furnace with automatic cleaning apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8420375A JPS527683A (en) 1975-07-08 1975-07-08 Gas phase glowing furnace with automatic cleaning apparatus

Publications (1)

Publication Number Publication Date
JPS527683A true JPS527683A (en) 1977-01-20

Family

ID=13823912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8420375A Pending JPS527683A (en) 1975-07-08 1975-07-08 Gas phase glowing furnace with automatic cleaning apparatus

Country Status (1)

Country Link
JP (1) JPS527683A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57115826A (en) * 1981-01-10 1982-07-19 Nec Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57115826A (en) * 1981-01-10 1982-07-19 Nec Corp Manufacture of semiconductor device

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