JPS527683A - Gas phase glowing furnace with automatic cleaning apparatus - Google Patents
Gas phase glowing furnace with automatic cleaning apparatusInfo
- Publication number
- JPS527683A JPS527683A JP8420375A JP8420375A JPS527683A JP S527683 A JPS527683 A JP S527683A JP 8420375 A JP8420375 A JP 8420375A JP 8420375 A JP8420375 A JP 8420375A JP S527683 A JPS527683 A JP S527683A
- Authority
- JP
- Japan
- Prior art keywords
- gas phase
- cleaning apparatus
- automatic cleaning
- glowing furnace
- glowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To eliminate the labour and danger of workers by automatically cleaning a glowing furnace for the glow of silicon oxide films or the likes through gas phase reaction.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8420375A JPS527683A (en) | 1975-07-08 | 1975-07-08 | Gas phase glowing furnace with automatic cleaning apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8420375A JPS527683A (en) | 1975-07-08 | 1975-07-08 | Gas phase glowing furnace with automatic cleaning apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS527683A true JPS527683A (en) | 1977-01-20 |
Family
ID=13823912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8420375A Pending JPS527683A (en) | 1975-07-08 | 1975-07-08 | Gas phase glowing furnace with automatic cleaning apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS527683A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57115826A (en) * | 1981-01-10 | 1982-07-19 | Nec Corp | Manufacture of semiconductor device |
-
1975
- 1975-07-08 JP JP8420375A patent/JPS527683A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57115826A (en) * | 1981-01-10 | 1982-07-19 | Nec Corp | Manufacture of semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51112786A (en) | Process for the removal of nitrogen oxide by absorption from exhaust g as | |
JPS5213020A (en) | Manifold reactor | |
JPS527683A (en) | Gas phase glowing furnace with automatic cleaning apparatus | |
JPS5217223A (en) | Gas burner | |
JPS5352356A (en) | Deposition prevention method in hot wall type reaction furnace | |
JPS52323A (en) | Inside abnormal gas detector of an oil-filled apparatus | |
JPS5285696A (en) | Corrosion prevention method for pipe arrangement of reactor | |
JPS52322A (en) | Inside abnorla gas detector of an oil-filled apparatus | |
JPS51117343A (en) | Gas combustion apparatus | |
JPS51133605A (en) | Exhaust gas cleaner of engine | |
JPS51111518A (en) | Controlling method of gas turbine | |
JPS5219347A (en) | Method to cool down transport pipe line of low temperature liquefied g as | |
JPS5330049A (en) | Induction heating cocking appliance | |
JPS5226059A (en) | Furnace-heat securing device | |
JPS5211419A (en) | Jointing structure of pipe | |
JPS5267861A (en) | Horizontalend heat pipe | |
JPS5347883A (en) | Temperature detector | |
JPS51145406A (en) | A fixed sonde for blast furnace shaft | |
JPS5214231A (en) | Furnace peep-in watch window | |
JPS525607A (en) | Preheating process by waste combustion gases of heating furnaces | |
JPS51142379A (en) | Temperature senser | |
JPS51147474A (en) | A process and apparatus for heat recovery from molten slag | |
JPS52119541A (en) | Flue cutting method | |
JPS5239397A (en) | Time schedule display device for blast furnace equipment | |
JPS51126965A (en) | A deodorizing apparatus |