JPS5275971A - Vacuum exhaustion equipment - Google Patents
Vacuum exhaustion equipmentInfo
- Publication number
- JPS5275971A JPS5275971A JP15182275A JP15182275A JPS5275971A JP S5275971 A JPS5275971 A JP S5275971A JP 15182275 A JP15182275 A JP 15182275A JP 15182275 A JP15182275 A JP 15182275A JP S5275971 A JPS5275971 A JP S5275971A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- heating
- pump
- vacuum exhaustion
- exhaustion equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Abstract
PURPOSE: The temperature of non-evaporation getter pump is detected prior to heating, and the pump heater is heated supposing the heating time based on the detected temperature. In this way, the final heating temperature of the pump is always kept constant regardless of the temperature of pre-heating.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50151822A JPS5948318B2 (en) | 1975-12-22 | 1975-12-22 | Shinkuhaikisouchi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50151822A JPS5948318B2 (en) | 1975-12-22 | 1975-12-22 | Shinkuhaikisouchi |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5275971A true JPS5275971A (en) | 1977-06-25 |
JPS5948318B2 JPS5948318B2 (en) | 1984-11-26 |
Family
ID=15527063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50151822A Expired JPS5948318B2 (en) | 1975-12-22 | 1975-12-22 | Shinkuhaikisouchi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5948318B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08164020A (en) * | 1994-12-13 | 1996-06-25 | Hakuhoudou:Kk | Slide mechanism of slide cosmetic brush |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917764A (en) * | 1972-06-05 | 1974-02-16 |
-
1975
- 1975-12-22 JP JP50151822A patent/JPS5948318B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4917764A (en) * | 1972-06-05 | 1974-02-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS5948318B2 (en) | 1984-11-26 |
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