JPS5275971A - Vacuum exhaustion equipment - Google Patents

Vacuum exhaustion equipment

Info

Publication number
JPS5275971A
JPS5275971A JP15182275A JP15182275A JPS5275971A JP S5275971 A JPS5275971 A JP S5275971A JP 15182275 A JP15182275 A JP 15182275A JP 15182275 A JP15182275 A JP 15182275A JP S5275971 A JPS5275971 A JP S5275971A
Authority
JP
Japan
Prior art keywords
temperature
heating
pump
vacuum exhaustion
exhaustion equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15182275A
Other languages
Japanese (ja)
Other versions
JPS5948318B2 (en
Inventor
Masahide Okumura
Yasushi Nakaizumi
Toshiaki Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50151822A priority Critical patent/JPS5948318B2/en
Publication of JPS5275971A publication Critical patent/JPS5275971A/en
Publication of JPS5948318B2 publication Critical patent/JPS5948318B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)

Abstract

PURPOSE: The temperature of non-evaporation getter pump is detected prior to heating, and the pump heater is heated supposing the heating time based on the detected temperature. In this way, the final heating temperature of the pump is always kept constant regardless of the temperature of pre-heating.
COPYRIGHT: (C)1977,JPO&Japio
JP50151822A 1975-12-22 1975-12-22 Shinkuhaikisouchi Expired JPS5948318B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50151822A JPS5948318B2 (en) 1975-12-22 1975-12-22 Shinkuhaikisouchi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50151822A JPS5948318B2 (en) 1975-12-22 1975-12-22 Shinkuhaikisouchi

Publications (2)

Publication Number Publication Date
JPS5275971A true JPS5275971A (en) 1977-06-25
JPS5948318B2 JPS5948318B2 (en) 1984-11-26

Family

ID=15527063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50151822A Expired JPS5948318B2 (en) 1975-12-22 1975-12-22 Shinkuhaikisouchi

Country Status (1)

Country Link
JP (1) JPS5948318B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08164020A (en) * 1994-12-13 1996-06-25 Hakuhoudou:Kk Slide mechanism of slide cosmetic brush

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917764A (en) * 1972-06-05 1974-02-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917764A (en) * 1972-06-05 1974-02-16

Also Published As

Publication number Publication date
JPS5948318B2 (en) 1984-11-26

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