JPS5274538A - Vaporisation process - Google Patents
Vaporisation processInfo
- Publication number
- JPS5274538A JPS5274538A JP14961375A JP14961375A JPS5274538A JP S5274538 A JPS5274538 A JP S5274538A JP 14961375 A JP14961375 A JP 14961375A JP 14961375 A JP14961375 A JP 14961375A JP S5274538 A JPS5274538 A JP S5274538A
- Authority
- JP
- Japan
- Prior art keywords
- vaporisation process
- vaporisation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title 1
- 238000009834 vaporization Methods 0.000 title 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14961375A JPS5274538A (en) | 1975-12-17 | 1975-12-17 | Vaporisation process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14961375A JPS5274538A (en) | 1975-12-17 | 1975-12-17 | Vaporisation process |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5274538A true JPS5274538A (en) | 1977-06-22 |
JPS5429408B2 JPS5429408B2 (enrdf_load_stackoverflow) | 1979-09-22 |
Family
ID=15479025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14961375A Granted JPS5274538A (en) | 1975-12-17 | 1975-12-17 | Vaporisation process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5274538A (enrdf_load_stackoverflow) |
-
1975
- 1975-12-17 JP JP14961375A patent/JPS5274538A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5429408B2 (enrdf_load_stackoverflow) | 1979-09-22 |
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