JPS5272161A - Process for cleaning silicon wafers - Google Patents

Process for cleaning silicon wafers

Info

Publication number
JPS5272161A
JPS5272161A JP14743875A JP14743875A JPS5272161A JP S5272161 A JPS5272161 A JP S5272161A JP 14743875 A JP14743875 A JP 14743875A JP 14743875 A JP14743875 A JP 14743875A JP S5272161 A JPS5272161 A JP S5272161A
Authority
JP
Japan
Prior art keywords
silicon wafers
cleaning silicon
cleaning
wafers
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14743875A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5522019B2 (enrdf_load_stackoverflow
Inventor
Kimihiro Muraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Electric Manufacturing Ltd
Original Assignee
Toyo Electric Manufacturing Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Electric Manufacturing Ltd filed Critical Toyo Electric Manufacturing Ltd
Priority to JP14743875A priority Critical patent/JPS5272161A/ja
Publication of JPS5272161A publication Critical patent/JPS5272161A/ja
Publication of JPS5522019B2 publication Critical patent/JPS5522019B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP14743875A 1975-12-12 1975-12-12 Process for cleaning silicon wafers Granted JPS5272161A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14743875A JPS5272161A (en) 1975-12-12 1975-12-12 Process for cleaning silicon wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14743875A JPS5272161A (en) 1975-12-12 1975-12-12 Process for cleaning silicon wafers

Publications (2)

Publication Number Publication Date
JPS5272161A true JPS5272161A (en) 1977-06-16
JPS5522019B2 JPS5522019B2 (enrdf_load_stackoverflow) 1980-06-13

Family

ID=15430325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14743875A Granted JPS5272161A (en) 1975-12-12 1975-12-12 Process for cleaning silicon wafers

Country Status (1)

Country Link
JP (1) JPS5272161A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6255048U (enrdf_load_stackoverflow) * 1985-09-26 1987-04-06

Also Published As

Publication number Publication date
JPS5522019B2 (enrdf_load_stackoverflow) 1980-06-13

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