JPS527202Y2 - - Google Patents

Info

Publication number
JPS527202Y2
JPS527202Y2 JP10510671U JP10510671U JPS527202Y2 JP S527202 Y2 JPS527202 Y2 JP S527202Y2 JP 10510671 U JP10510671 U JP 10510671U JP 10510671 U JP10510671 U JP 10510671U JP S527202 Y2 JPS527202 Y2 JP S527202Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10510671U
Other languages
Japanese (ja)
Other versions
JPS4860602U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10510671U priority Critical patent/JPS527202Y2/ja
Priority to DE19722255063 priority patent/DE2255063A1/en
Priority to FR7240010A priority patent/FR2162910A5/fr
Priority to GB5225972A priority patent/GB1409255A/en
Publication of JPS4860602U publication Critical patent/JPS4860602U/ja
Application granted granted Critical
Publication of JPS527202Y2 publication Critical patent/JPS527202Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/22Exposing sequentially with the same light pattern different positions of the same surface
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP10510671U 1971-11-12 1971-11-12 Expired JPS527202Y2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10510671U JPS527202Y2 (en) 1971-11-12 1971-11-12
DE19722255063 DE2255063A1 (en) 1971-11-12 1972-11-10 PHOTO SETTING MACHINE
FR7240010A FR2162910A5 (en) 1971-11-12 1972-11-10
GB5225972A GB1409255A (en) 1971-11-12 1972-11-13 Photo-composing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10510671U JPS527202Y2 (en) 1971-11-12 1971-11-12

Publications (2)

Publication Number Publication Date
JPS4860602U JPS4860602U (en) 1973-08-02
JPS527202Y2 true JPS527202Y2 (en) 1977-02-16

Family

ID=14398595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10510671U Expired JPS527202Y2 (en) 1971-11-12 1971-11-12

Country Status (4)

Country Link
JP (1) JPS527202Y2 (en)
DE (1) DE2255063A1 (en)
FR (1) FR2162910A5 (en)
GB (1) GB1409255A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4012208C1 (en) * 1990-04-14 1991-10-17 Krause-Biagosch Gmbh, 4800 Bielefeld, De Printing plate exposure system - incorporates spring mechanism on suction frame

Also Published As

Publication number Publication date
DE2255063A1 (en) 1973-05-17
FR2162910A5 (en) 1973-07-20
JPS4860602U (en) 1973-08-02
GB1409255A (en) 1975-10-08

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