JPS5270944A - Method of forming titanium carbide film - Google Patents
Method of forming titanium carbide filmInfo
- Publication number
- JPS5270944A JPS5270944A JP14755375A JP14755375A JPS5270944A JP S5270944 A JPS5270944 A JP S5270944A JP 14755375 A JP14755375 A JP 14755375A JP 14755375 A JP14755375 A JP 14755375A JP S5270944 A JPS5270944 A JP S5270944A
- Authority
- JP
- Japan
- Prior art keywords
- titanium carbide
- carbide film
- forming titanium
- forming
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 title 1
Landscapes
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14755375A JPS5270944A (en) | 1975-12-10 | 1975-12-10 | Method of forming titanium carbide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14755375A JPS5270944A (en) | 1975-12-10 | 1975-12-10 | Method of forming titanium carbide film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5270944A true JPS5270944A (en) | 1977-06-13 |
| JPS5527619B2 JPS5527619B2 (cs) | 1980-07-22 |
Family
ID=15432922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14755375A Granted JPS5270944A (en) | 1975-12-10 | 1975-12-10 | Method of forming titanium carbide film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5270944A (cs) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4867134A (cs) * | 1971-12-20 | 1973-09-13 | ||
| JPS4977841A (cs) * | 1972-12-01 | 1974-07-26 | ||
| JPS50123048A (cs) * | 1974-03-15 | 1975-09-27 |
-
1975
- 1975-12-10 JP JP14755375A patent/JPS5270944A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4867134A (cs) * | 1971-12-20 | 1973-09-13 | ||
| JPS4977841A (cs) * | 1972-12-01 | 1974-07-26 | ||
| JPS50123048A (cs) * | 1974-03-15 | 1975-09-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5527619B2 (cs) | 1980-07-22 |
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