JPS5267166A - Apparatus for washing quartz tube - Google Patents

Apparatus for washing quartz tube

Info

Publication number
JPS5267166A
JPS5267166A JP50143612A JP14361275A JPS5267166A JP S5267166 A JPS5267166 A JP S5267166A JP 50143612 A JP50143612 A JP 50143612A JP 14361275 A JP14361275 A JP 14361275A JP S5267166 A JPS5267166 A JP S5267166A
Authority
JP
Japan
Prior art keywords
quartz tube
high frequency
washing quartz
washing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50143612A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5316229B2 (show.php
Inventor
Kazumasa Ono
Minoru Hirai
Makoto Terajima
Hiroshi Asakawa
Kazuo Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50143612A priority Critical patent/JPS5267166A/ja
Publication of JPS5267166A publication Critical patent/JPS5267166A/ja
Publication of JPS5316229B2 publication Critical patent/JPS5316229B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP50143612A 1975-12-01 1975-12-01 Apparatus for washing quartz tube Granted JPS5267166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50143612A JPS5267166A (en) 1975-12-01 1975-12-01 Apparatus for washing quartz tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50143612A JPS5267166A (en) 1975-12-01 1975-12-01 Apparatus for washing quartz tube

Publications (2)

Publication Number Publication Date
JPS5267166A true JPS5267166A (en) 1977-06-03
JPS5316229B2 JPS5316229B2 (show.php) 1978-05-30

Family

ID=15342775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50143612A Granted JPS5267166A (en) 1975-12-01 1975-12-01 Apparatus for washing quartz tube

Country Status (1)

Country Link
JP (1) JPS5267166A (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2201329B (en) * 1987-02-26 1990-11-14 Autoliv Dev Improvements in or relating to a seat belt buckle arrangement

Also Published As

Publication number Publication date
JPS5316229B2 (show.php) 1978-05-30

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