JPS5266883A - Evaporation source for vacuum evaporation - Google Patents

Evaporation source for vacuum evaporation

Info

Publication number
JPS5266883A
JPS5266883A JP14236575A JP14236575A JPS5266883A JP S5266883 A JPS5266883 A JP S5266883A JP 14236575 A JP14236575 A JP 14236575A JP 14236575 A JP14236575 A JP 14236575A JP S5266883 A JPS5266883 A JP S5266883A
Authority
JP
Japan
Prior art keywords
evaporation
vacuum
source
evaporation source
vacuum evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14236575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS559460B2 (show.php
Inventor
Fukumatsu Sakagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP14236575A priority Critical patent/JPS5266883A/ja
Publication of JPS5266883A publication Critical patent/JPS5266883A/ja
Publication of JPS559460B2 publication Critical patent/JPS559460B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14236575A 1975-12-02 1975-12-02 Evaporation source for vacuum evaporation Granted JPS5266883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14236575A JPS5266883A (en) 1975-12-02 1975-12-02 Evaporation source for vacuum evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14236575A JPS5266883A (en) 1975-12-02 1975-12-02 Evaporation source for vacuum evaporation

Publications (2)

Publication Number Publication Date
JPS5266883A true JPS5266883A (en) 1977-06-02
JPS559460B2 JPS559460B2 (show.php) 1980-03-10

Family

ID=15313678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14236575A Granted JPS5266883A (en) 1975-12-02 1975-12-02 Evaporation source for vacuum evaporation

Country Status (1)

Country Link
JP (1) JPS5266883A (show.php)

Also Published As

Publication number Publication date
JPS559460B2 (show.php) 1980-03-10

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