JPS5266883A - Evaporation source for vacuum evaporation - Google Patents
Evaporation source for vacuum evaporationInfo
- Publication number
- JPS5266883A JPS5266883A JP14236575A JP14236575A JPS5266883A JP S5266883 A JPS5266883 A JP S5266883A JP 14236575 A JP14236575 A JP 14236575A JP 14236575 A JP14236575 A JP 14236575A JP S5266883 A JPS5266883 A JP S5266883A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- vacuum
- source
- evaporation source
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14236575A JPS5266883A (en) | 1975-12-02 | 1975-12-02 | Evaporation source for vacuum evaporation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14236575A JPS5266883A (en) | 1975-12-02 | 1975-12-02 | Evaporation source for vacuum evaporation |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5266883A true JPS5266883A (en) | 1977-06-02 |
JPS559460B2 JPS559460B2 (es) | 1980-03-10 |
Family
ID=15313678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14236575A Granted JPS5266883A (en) | 1975-12-02 | 1975-12-02 | Evaporation source for vacuum evaporation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5266883A (es) |
-
1975
- 1975-12-02 JP JP14236575A patent/JPS5266883A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS559460B2 (es) | 1980-03-10 |
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