JPS526492B2 - - Google Patents
Info
- Publication number
- JPS526492B2 JPS526492B2 JP46105652A JP10565271A JPS526492B2 JP S526492 B2 JPS526492 B2 JP S526492B2 JP 46105652 A JP46105652 A JP 46105652A JP 10565271 A JP10565271 A JP 10565271A JP S526492 B2 JPS526492 B2 JP S526492B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP46105652A JPS526492B2 (en) | 1971-12-28 | 1971-12-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP46105652A JPS526492B2 (en) | 1971-12-28 | 1971-12-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4873815A JPS4873815A (en) | 1973-10-05 |
JPS526492B2 true JPS526492B2 (en) | 1977-02-22 |
Family
ID=14413364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP46105652A Expired JPS526492B2 (en) | 1971-12-28 | 1971-12-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS526492B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325690A (en) * | 1986-07-18 | 1988-02-03 | 笹山 二男 | Ultraviolet projection type fluorescent display device |
JP2017530360A (en) * | 2014-09-30 | 2017-10-12 | マイクロ モーション インコーポレイテッド | Automatic alignment wafer type process instrument |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9846022B2 (en) * | 2015-09-25 | 2017-12-19 | Dieterich Standard, Inc. | Wafer alignment device |
-
1971
- 1971-12-28 JP JP46105652A patent/JPS526492B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325690A (en) * | 1986-07-18 | 1988-02-03 | 笹山 二男 | Ultraviolet projection type fluorescent display device |
JP2017530360A (en) * | 2014-09-30 | 2017-10-12 | マイクロ モーション インコーポレイテッド | Automatic alignment wafer type process instrument |
Also Published As
Publication number | Publication date |
---|---|
JPS4873815A (en) | 1973-10-05 |