JPS5262344U - - Google Patents

Info

Publication number
JPS5262344U
JPS5262344U JP14867475U JP14867475U JPS5262344U JP S5262344 U JPS5262344 U JP S5262344U JP 14867475 U JP14867475 U JP 14867475U JP 14867475 U JP14867475 U JP 14867475U JP S5262344 U JPS5262344 U JP S5262344U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14867475U
Other languages
Japanese (ja)
Other versions
JPS557554Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975148674U priority Critical patent/JPS557554Y2/ja
Publication of JPS5262344U publication Critical patent/JPS5262344U/ja
Application granted granted Critical
Publication of JPS557554Y2 publication Critical patent/JPS557554Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1975148674U 1975-10-31 1975-10-31 Expired JPS557554Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975148674U JPS557554Y2 (de) 1975-10-31 1975-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975148674U JPS557554Y2 (de) 1975-10-31 1975-10-31

Publications (2)

Publication Number Publication Date
JPS5262344U true JPS5262344U (de) 1977-05-09
JPS557554Y2 JPS557554Y2 (de) 1980-02-20

Family

ID=28628208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975148674U Expired JPS557554Y2 (de) 1975-10-31 1975-10-31

Country Status (1)

Country Link
JP (1) JPS557554Y2 (de)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023382A (de) * 1973-07-05 1975-03-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023382A (de) * 1973-07-05 1975-03-13

Also Published As

Publication number Publication date
JPS557554Y2 (de) 1980-02-20

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