JPS5262087A - Reference concentration gas generating device - Google Patents

Reference concentration gas generating device

Info

Publication number
JPS5262087A
JPS5262087A JP13801675A JP13801675A JPS5262087A JP S5262087 A JPS5262087 A JP S5262087A JP 13801675 A JP13801675 A JP 13801675A JP 13801675 A JP13801675 A JP 13801675A JP S5262087 A JPS5262087 A JP S5262087A
Authority
JP
Japan
Prior art keywords
generating device
gas generating
reference concentration
concentration gas
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13801675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5324836B2 (enExample
Inventor
Shiro Yanai
Shigenobu Kishimoto
Takeshi Murayama
Yozo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP13801675A priority Critical patent/JPS5262087A/ja
Publication of JPS5262087A publication Critical patent/JPS5262087A/ja
Publication of JPS5324836B2 publication Critical patent/JPS5324836B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP13801675A 1975-11-17 1975-11-17 Reference concentration gas generating device Granted JPS5262087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13801675A JPS5262087A (en) 1975-11-17 1975-11-17 Reference concentration gas generating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13801675A JPS5262087A (en) 1975-11-17 1975-11-17 Reference concentration gas generating device

Publications (2)

Publication Number Publication Date
JPS5262087A true JPS5262087A (en) 1977-05-23
JPS5324836B2 JPS5324836B2 (enExample) 1978-07-22

Family

ID=15212077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13801675A Granted JPS5262087A (en) 1975-11-17 1975-11-17 Reference concentration gas generating device

Country Status (1)

Country Link
JP (1) JPS5262087A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100656415B1 (ko) 2005-12-30 2006-12-11 한국표준과학연구원 표준가스 제조용 액체 주입장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100656415B1 (ko) 2005-12-30 2006-12-11 한국표준과학연구원 표준가스 제조용 액체 주입장치

Also Published As

Publication number Publication date
JPS5324836B2 (enExample) 1978-07-22

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